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Angular resolution micro-Raman spectral detection device and detection method

A spectral detection and micro-Raman technology, applied in spectrometry/spectrophotometry/monochromator, measuring device, polarization spectrum, etc., can solve problems such as fixed geometric configuration

Pending Publication Date: 2019-09-13
TIANJIN UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0005] The purpose of the present invention is to provide an angle-resolved micro-Raman spectroscopy detection device and detection method to solve the problem that the geometric configuration of the micro-Raman spectroscopy detection device in the prior art is fixed for sample detection, resulting in the inability to refine the sample. measurement problem

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  • Angular resolution micro-Raman spectral detection device and detection method

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Embodiment 1

[0093] The angle-resolved micro-Raman spectroscopy detection device 100 can realize refined measurement of the sample 31, for example, decoupling analysis of complex stress states.

[0094] Taking the measurement of "the stress component of {100} crystal plane single crystal silicon under non-equivalent biaxial stress state" as an example, the analysis method of bidirectional stress decoupling on the {100} crystal plane of single crystal silicon is realized by Raman detection with changing inclination angle. The steps for decoupling measurement of the in-plane stress of the single crystal silicon sample 31 are as follows:

[0095] The first step is to prepare the sample 31: take the {100} crystal plane monocrystalline silicon cut to a specific size as the sample 31 to be tested, and its length, width and height directions are respectively along the [100] crystal direction, [010] crystal direction and [ 001] crystal orientation, such as Image 6 -7, and grind the sample 31 to ...

Embodiment 2

[0106] Taking "fine analysis of unidirectional residual stress of unknown orientation of epitaxially grown (001) single crystal silicon thin film" as an example, the device of the present invention is used for testing experiments. The material to be tested is an epitaxially grown monocrystalline silicon film, the surface of which is a (001) crystal plane, and there is unidirectional residual stress in the plane caused by process factors, and the magnitude and direction of the stress are to be measured. The direction of this stress cannot be measured using existing Raman systems.

[0107] The concrete steps that adopt the present invention to carry out residual stress analysis are as follows:

[0108] The first step, system construction: such as figure 1 or Figure 4 As shown, connect the various components;

[0109] The second step, sample 31 is installed: sample 31 is arranged on the sample table 3, and establish as Figure 5 The geometric relationship shown; wherein, the...

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Abstract

The present invention provides an angular resolution micro-Raman spectral detection device and detection method, and relates to the technical field of optical measuring devices. The angular resolutionmicro-Raman spectral detection device comprises: a Raman detection mechanism and an inclined angle control mechanism. The Raman detection mechanism is provided with a signal port. The signal port corresponds to a sample. The Raman detection mechanism can emit a laser signal to a sample surface, collect scattered signals excited by the sample surface, and perform Raman spectral analysis. The Ramandetection mechanism is connected with the inclined angle control mechanism. The inclined angle control mechanism is used for adjusting a connecting angle of the Raman detection mechanism and the inclined angle control mechanism, so as to adjust an angle of a detection inclined angle of the angular resolution micro-Raman spectral detection device. The scattered signals at different detection inclined angles on the same detection point on the sample surface are collected to obtain spectral data at different detection inclined angles on the same detection point, so as to realize the fine measurement of the sample.

Description

technical field [0001] The invention relates to the technical field of optical measuring equipment, in particular to an angle-resolved micro-Raman spectrum detection device and a detection method. Background technique [0002] Micro-Raman spectroscopy is a micro-scale non-destructive testing technology commonly used in the fields of materials, biology, archaeology, chemistry, mechanics, etc. This technology can obtain the chemical composition, crystal orientation, stress or Information such as strain is widely used in experimental analysis in many fields. Existing devices, whether commercial or academically developed, already have many types of microscopic Raman spectroscopy detection devices. [0003] Micro-nano science and technology have an increasing demand for precise, in-situ, and online measurement research on complex materials and structures, such as crystal orientation identification of complex crystal structures, calibration of Raman tensor coefficients, decouplin...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01J3/44G01J3/28G01J3/447G01J3/02G01J3/12G01N21/65G01N21/47
CPCG01J3/44G01J3/2823G01J3/447G01J3/0278G01J3/12G01N21/65G01N21/47G01J2003/1291G01N2021/4792
Inventor 仇巍常颖亢一澜曲传咏张茜孟田
Owner TIANJIN UNIV
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