Multifunctional C4F7N/CO2 mixed gas distribution system and method
A C4F7N, mixed gas technology, used in mixing methods, gas and gas/vapor mixing, organic gas insulators, etc., can solve the problems of slow vaporization, unable to quickly prepare mixed gas, etc., to ensure stability and improve gas distribution rate. Effect
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Embodiment 1
[0064] Such as figure 1 As shown, this embodiment discloses a multifunctional C 4 F 7 N / CO 2 Mixed gas distribution system, including C 4 F 7 N input port 1, CO 2 Input port 2, C 4 F 7 N heat exchanger 3, CO 2 Heat exchanger 4, C 4 F 7 N / CO 2 Mixed pipeline structure 5, C 4 F 7 N / CO 2 Mixed gas output pipeline structure 7.
[0065] C 4 F 7 N heat exchanger 3 is used to align the warp C 4 F 7 N input port 1 input C 4 F 7 N is heated and vaporized. CO 2 Heat exchanger 4 is used to compare CO 2 CO input from input 2 2 Perform heating and vaporization. C 4 F 7 N / CO 2 Mixing pipeline structure 5 is used to control the vaporized C 4 F 7 N, CO 2 To mix, C 4 F 7 N / CO 2 The mixed gas output pipeline structure 7 is used to output the mixed C 4 F 7 N / CO 2 mixed composition.
[0066] C 4 F 7 N / CO 2 Hybrid pipeline structure 5 includes C 4 F 7 N / CO 2 Dynamic gas distribution pipeline structure 51, C 4 F 7 N / CO 2 Partial pressure mixing pipeline structure 52.
[0067] C 4 F 7 N / CO 2 Dynamic gas d...
Embodiment 2
[0073] Such as figure 2 As shown, the difference between this embodiment and the above embodiment is that a specific C 4 F 7 N / CO 2 Dynamic gas distribution pipeline structure 51.
[0074] The C 4 F 7 N / CO 2 The dynamic gas distribution pipeline structure 51 includes a first solenoid valve 511, a second solenoid valve 512, a first thermal mass flow meter 513, a second thermal mass flow meter 514, a buffer mixing tank 515, a first pipe 516, and a second pipe 517.
[0075] The buffer mixing tank 515 is provided with a first air inlet, a second air inlet, and a first mixed gas outlet.
[0076] CO 2 The air outlet of the heat exchanger 4 communicates with the first air inlet through a first pipe 516, and the first solenoid valve 511 and the first thermal mass flow meter 513 are both arranged on the first pipe 516. C 4 F 7 The air outlet of the N heat exchanger 3 communicates with the second air inlet through a second pipe 517, and the second solenoid valve 512 and the second thermal ma...
Embodiment 3
[0080] Such as figure 2 As shown, the difference between this embodiment and the foregoing embodiment is that a first differential pressure sensor 518 is provided on the buffer mixing tank 515. By setting the first differential pressure sensor 518 on the buffer mixing tank 515, the mixed C 4 F 7 N / CO 2 The pressure of the mixed gas is tested to further monitor the accuracy of the mixed gas. Of course, if C 4 F 7 N / CO 2 The pressure value of the mixed gas deviates from the set range, the first differential pressure sensor 518 also sends a signal to the control center, and the control center drives the first solenoid valve 511 and the second solenoid valve 512 to adjust the corresponding opening.
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