Resistance-changing capacitance-changing composite two-dimensional strain sensor and preparation method thereof

Abstract

The invention discloses a resistance-changing capacitance-changing composite two-dimensional strain sensor and a preparation method thereof. The resistance-changing capacitance-changing composite two-dimensional strain sensor proposed by the invention is of a three-layer structure including an upper plate, an insulating dielectric layer and a lower plate of of a parallel plate capacitor in design.The conductive materials for the upper plate and the lower plate are selected from metals having a micro / nano structure, a carbon conductive materials or metal-carbon mixed conductive materials, thebipolar plate patterns are designed in a serpentine shape, and the upper plate and the lower plate of the capacitor are simultaneously used as a resistance-changing tensile strain sensor. The resistance-changing capacitance-changing composite two-dimensional strain sensor of the invention detects a tensile strain in a horizontal direction through a capacitance-changing phenomenon, detects a tensile strain in ae vertical direction through a resistance-changing phenomenon, and detects a tensile strain in a two-dimensional orthogonal direction by using the resistance-changing capacitance-changingcomposite form, so as to have flexible and tensile characteristics; and the resistance-changing tensile sensor adopts a permeable conductive network structure and has good sensitivity.

Description

technical field [0001] The invention relates to the field of strain sensor devices, in particular to a two-dimensional strain sensor and a preparation method thereof. Background technique [0002] The traditional tensile strain gauge is based on the piezoresistive effect to detect the force on the object. It uses metal film, metal wire and semiconductor as the sensing material. Due to the high rigidity of metal and semiconductor materials, it cannot produce large Deformation, and does not have stretchable characteristics, resulting in traditional tensile strain gauges based on metal and semiconductor materials, even if they can have high sensitivity, they can only be used in a small stretching range (less than 5%), not applicable In the field of flexible electronic devices and smart wearables in the future. [0003] The new flexible and stretchable strain sensor has received widespread attention in recent years. Compared with the traditional tensile strain gauge, it has the...

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Problems solved by technology

The resistive two-dimensional tensile strain gauge with an orthogonal pattern needs to align the center of the electrode pattern on the upper layer and the lower layer, which requires high process requirements; Refers to the capacitance, and the double capacitance is easy to interfere with each other during tensile strain, resulting in a decrease in the signal-to-noise ratio

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