Resistance-changing capacitance-changing composite two-dimensional strain sensor and preparation method thereof

A two-dimensional strain and sensor technology, which can be used in the measurement of fluid pressure by changing capacitance, fluid pressure measurement by changing ohmic resistance, and measurement of property force by applying piezoelectric resistance materials. It can solve the problem of high process requirements, signal noise It has the advantages of simple manufacturing process, high sensitivity characteristics and good development prospects.

Active Publication Date: 2019-10-15
UNIV OF ELECTRONICS SCI & TECH OF CHINA
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The resistive two-dimensional tensile strain gauge with an orthogonal pattern needs to align the center of the electrode pattern on the upper layer and the lower layer, which requires high process requirements; Refers to the capacitance, and the double capacitance is easy to interfere with each other during tensile strain, resulting in a decrease in the signal-to-noise ratio

Method used

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  • Resistance-changing capacitance-changing composite two-dimensional strain sensor and preparation method thereof
  • Resistance-changing capacitance-changing composite two-dimensional strain sensor and preparation method thereof
  • Resistance-changing capacitance-changing composite two-dimensional strain sensor and preparation method thereof

Examples

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Embodiment 1

[0030] Such as Figure 5 The RCV composite two-dimensional strain sensor implemented in this embodiment adopts the structural design of the serpentine conductive upper plate 501, the insulating dielectric layer 502, the serpentine conductive lower plate 503, and the encapsulation layer 504 of the parallel plate capacitor.

[0031] according to the structure figure 1 The serpentine conductive upper plate includes a flexible substrate 104, silver nanowire conductive network 106, and metal electrodes 107; the insulating dielectric layer 104 serves as the flexible base of the serpentine conductive upper plate; the serpentine conductive lower plate includes a flexible substrate 101, Silver nanowire conductive network 102, metal electrode 103; packaging layer 105 uses polydimethylsiloxane to package the two-dimensional strain sensor. The preparation process of the two-dimensional strain sensor with silver nanowire as conductive material, copper as metal electrode, polydimethylsilox...

Embodiment 2

[0048] The conductive material of the snake-shaped conductive upper and lower plates is not limited to the use of metal materials with micro-nano structures, but also metal carbon materials with micro-nano structures. This example will introduce the resistance switch based on multi-walled carbon nanotube conductive materials The invention discloses a method for preparing a two-dimensional strain sensor of a capacitive compound.

[0049] (1) The composition ratio and preparation method of the flexible substrate: the same as the preparation method in Step 1 of Example 1.

[0050] (2) Preparation method of serpentine pattern mask: the same as the preparation method of step 2 of embodiment 1.

[0051] (3) Preparation method of serpentine conductive bottom plate:

[0052] The snake-shaped conductive lower plate uses multi-walled carbon nanotubes as the conductive material. , purity: 98%, model: M3, Beijing Boyu Gaoke New Material Technology Co., Ltd.) 50mg, deionized water 10mL, ...

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Abstract

The invention discloses a resistance-changing capacitance-changing composite two-dimensional strain sensor and a preparation method thereof. The resistance-changing capacitance-changing composite two-dimensional strain sensor proposed by the invention is of a three-layer structure including an upper plate, an insulating dielectric layer and a lower plate of of a parallel plate capacitor in design.The conductive materials for the upper plate and the lower plate are selected from metals having a micro/nano structure, a carbon conductive materials or metal-carbon mixed conductive materials, thebipolar plate patterns are designed in a serpentine shape, and the upper plate and the lower plate of the capacitor are simultaneously used as a resistance-changing tensile strain sensor. The resistance-changing capacitance-changing composite two-dimensional strain sensor of the invention detects a tensile strain in a horizontal direction through a capacitance-changing phenomenon, detects a tensile strain in ae vertical direction through a resistance-changing phenomenon, and detects a tensile strain in a two-dimensional orthogonal direction by using the resistance-changing capacitance-changingcomposite form, so as to have flexible and tensile characteristics; and the resistance-changing tensile sensor adopts a permeable conductive network structure and has good sensitivity.

Description

technical field [0001] The invention relates to the field of strain sensor devices, in particular to a two-dimensional strain sensor and a preparation method thereof. Background technique [0002] The traditional tensile strain gauge is based on the piezoresistive effect to detect the force on the object. It uses metal film, metal wire and semiconductor as the sensing material. Due to the high rigidity of metal and semiconductor materials, it cannot produce large Deformation, and does not have stretchable characteristics, resulting in traditional tensile strain gauges based on metal and semiconductor materials, even if they can have high sensitivity, they can only be used in a small stretching range (less than 5%), not applicable In the field of flexible electronic devices and smart wearables in the future. [0003] The new flexible and stretchable strain sensor has received widespread attention in recent years. Compared with the traditional tensile strain gauge, it has the...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01L1/18G01L1/14G01L9/06G01L9/12
CPCG01L1/146G01L1/18G01L9/06G01L9/12
Inventor 张晓升李国科张新然刘盾鲍景富
Owner UNIV OF ELECTRONICS SCI & TECH OF CHINA
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