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A kind of long tube rotation target binding method

A technology of rotating target and binding, applied in vacuum evaporation plating, coating, electrolysis components, etc., can solve the problems of poor welding effect at the connection port, many connection ports of the rotating target material, and many connection ports, etc., to achieve controllable It has the advantages of strong operability and operability, improving the bonding and welding rate, and reducing the difficulty of operation.

Active Publication Date: 2020-06-19
东莞市欧莱溅射靶材有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] The existing binding method of the rotating target divides the rotating target into multiple sections and binds it sequentially. This binding method requires the binding of the next rotating target after the rotating target bound in the previous section cools down, and the binding time is long. , the production efficiency is low, and there are many connection ports between the rotating targets, it is easy to deform the ports during the welding process and cause the leakage of the bonding layer solder. Bubbles or light slag in the solder concentrate at the connection port, making the welding effect at the connection port poor
Due to the many connection ports of the rotating target bound by this method, the thickness of the film formed during use is uneven, which affects the product quality. With the development of science and technology, the rotating target products produced by the traditional segmented binding method can no longer meet the requirements. Film Product Requirements

Method used

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  • A kind of long tube rotation target binding method
  • A kind of long tube rotation target binding method
  • A kind of long tube rotation target binding method

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0166] A method for binding a long-tube rotating target, comprising the following steps: a. Step before pretreatment, sandblasting, cleaning and drying the inner sidewall of the whole tube of the target material and the outer sidewall of the back tube respectively;

[0167] b. The pretreatment step of the whole target tube and the back tube is to ultrasonically coat and bind the metal solder on the outer wall of the back tube after cleaning and drying to form a metallized layer of the back tube, and to clean and dry the inner side of the whole target tube The wall is brush-plated with a reinforced metal layer, and on the basis of the reinforced metal layer, ultrasonic coating is performed to bind metal solder to form a target metallization layer;

[0168] c. Assembly step, insert the back tube into the target tube, put positioning beads between the back tube and the target tube to form a pre-bound target, and position the beads to limit the distance between the back tube and th...

Embodiment 2

[0173] Embodiment 2 is different from embodiment 1 in that:

[0174] In d, in the binding step, start the internal heating device and the external heating device of the binding equipment to heat the pre-binding target to 225°C respectively, start the vibration device of the binding equipment to vibrate the pre-binding target as a whole, and pass The sprue pours the molten bonding metal solder with a temperature of 225°C into the bonding layer three times;

[0175] In e, the cooling step, the water cooling ring rises at a constant speed of 30 mm / min.

[0176] Wherein d, binding step and e, cooling step, the vibration frequency of the vibration device is 2850 times / min.

Embodiment 3

[0178] Embodiment 3 is different from embodiment 1 in that:

[0179] In d, in the binding step, start the internal heating device and the external heating device of the binding equipment to heat the pre-binding target to 300°C respectively, start the vibration device of the binding equipment to vibrate the pre-binding target as a whole, and pass The sprue is poured three times into the bonding layer with the bonding metal solder in the molten state at a temperature of 300°C;

[0180] In e, the cooling step, the water-cooling ring rises at a constant speed of 35 mm / min.

[0181] Wherein d, binding step and e, cooling step, the vibration frequency of the vibration device is 2900 times / min.

[0182] The binding and welding rates of the rotating targets obtained in Examples 1 to 3 were all above 99% through C-SCAN detection. In addition, the good product rate of the whole target binding is as high as 99.2%.

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Abstract

The invention discloses a long pipe rotating target binding method. The long pipe rotating target binding method includes a, a step before pretreatment, b, a target material whole pipe and back pipe pretreatment step, c, an assembling step, d, a binding step, and e, a cooling step. According to the long pipe rotating target binding method, one-time whole pipe binding of a rotating target can be achieved, the target material binding welded rate is high, and the product quality is good.

Description

technical field [0001] The invention relates to the technical field of rotating target binding, in particular to a long-tube rotating target binding method. Background technique [0002] The rotating target is in the shape of a hollow tube, which can rotate around the fixed strip magnet assembly, and can uniformly etch the target surface at 360 degrees. It has the advantages of high utilization rate, good coating continuity, and uniform coating composition. The traditional binding method for rotating targets is to put a cylindrical target with a large diameter on a back tube with a relatively small diameter, and inject fused metal indium between the two, and after cooling, the rotating target It is integrated with the back tube through solidified indium to achieve the purpose of binding. [0003] The existing binding method of the rotating target divides the rotating target into multiple sections and binds it sequentially. This binding method requires the binding of the nex...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C14/35B22D19/16B22D27/04B22D27/08C23C26/00C25D5/06C25D5/38C25D7/04C25D17/00
CPCB22D19/16B22D27/04B22D27/08C23C14/3407C23C14/35C23C26/00C25D5/06C25D5/38C25D7/04C25D17/00
Inventor 陈明恒
Owner 东莞市欧莱溅射靶材有限公司
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