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Fixed-point rotary cutting method for off-axis microlens machining

A fixed-point rotation and cutting method technology, which is applied in the field of ultra-precision machining of microlens optical elements, can solve problems such as unfavorable X-axis smooth movement, difficulty in cutting trajectory planning, and reduced machining accuracy of off-axis microlenses, so as to increase stability and improve The effect of machining accuracy

Active Publication Date: 2019-11-05
HARBIN INST OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] The purpose of the present invention is to solve the existing slow tool servo method or fast tool servo method because the high-frequency compensation motion is added on the X-axis and Z-axis of the machine tool, which is not conducive to the smooth movement of the X-axis with large inertia, resulting in reduced off-axis The problem of the machining accuracy of the microlens and the difficulty of planning the cutting trajectory

Method used

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  • Fixed-point rotary cutting method for off-axis microlens machining
  • Fixed-point rotary cutting method for off-axis microlens machining
  • Fixed-point rotary cutting method for off-axis microlens machining

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specific Embodiment approach 1

[0040] Specific implementation mode one: combine Figure 1 to Figure 4 Describe this embodiment mode, a kind of fixed-point rotary cutting method for off-axis microlens processing of this embodiment mode, it comprises the following steps:

[0041] Step 1: Adjust the distance between the workpiece rotation center axis and the spindle axis of the ultra-precision machine tool, so that the radial distance between the two axes is controlled within 0.5 μm (inclusive); the workpiece 2 is glued to the fixture 3, and the fixture 3 is vacuum-adsorbed to the ultra-precision machine tool The vacuum chuck 4; use the precision measuring tools such as inductance micrometer or dial indicator that comes with the machine tool to measure the radial circular runout error of the cylindrical surface of the workpiece 2, and adjust the fixture 3 by tapping the leather hammer along the radial direction so that the workpiece 2 is rotating The radial circular runout error within one week is controlled w...

specific Embodiment approach 2

[0055] Specific implementation mode two: combination Figure 1 to Figure 4 This embodiment is described. The fixed-point rotary cutting method of this embodiment is suitable for processing various types of materials. For example, in step one, the material of the processed part can be a plastic material used as a mold, such as duralumin 6061, die steel, electroless nickel, etc., or a brittle material as a separate part product, such as a single Crystal germanium, single crystal silicon, etc. Such setting makes the processing method have a wider scope of material application. Other compositions and connections are the same as in the first embodiment.

[0056] In step 1 of this embodiment, the material of the processed part is a plastic material or a brittle material; the type of the microlens unit of the processed part is a concave mirror or a convex mirror.

specific Embodiment approach 3

[0057] Specific implementation mode three: combination Figure 1 to Figure 4 This embodiment will be described. In this embodiment, a variety of processing tools with different shapes and materials can be selected. For example, in step 2, the tool material used can be either single crystal diamond, nano-twinned diamond, or polycrystalline diamond and other tool materials used for ultra-precision machining of optical elements. The shape of the tool used can be either a formed turning tool or a non-shaped turning tool, for example, a circular arc edge turning tool, a straight edge turning tool and a sharp knife. If the tool used is an arc-edge turning tool, the arc radius of the tool tip is not greater than the minimum radius of curvature of the generatrix of the microlens profile. Such setting makes the processing method have more flexible tool parameter setting and expands the applicable range of the method. Other compositions and connections are the same as those in Embodim...

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Abstract

The invention discloses a fixed-point rotary cutting method for off-axis microlens machining, and relates to a fixed-point rotary cutting method. The problem that the machining precision of a microlens is reduced due to the high-frequency motion which adversely affects the motion stability of a machine tool when the corner radius is compensated in the prior art, and the problem that planning of acutting track is difficult are solved. The method comprises the first step of adjusting the distance between the rotation center axis of a workpiece and the spindle axis of an ultra-precision machinetool to be controlled within 0.5 micrometer, the second step of controlling the radial distance between a tool tip of a tool and the rotation center axis of the workpiece to be within 0.5 micrometer by adopting a trial cutting method, the third step of moving the tool tip to the central axis position of a certain microlens unit of a microlens part to be machined through machine tool linkage, the fourth step of planning an actual cutting track, the fifth step of achieving cutting machining of one single microlens unit through machine tool linkage and the sixth step of repeatedly performing thethird, fourth and fifth steps till all the microlesn units on the surface are machined. The fixed-point rotary cutting method is used for off-axis microlens machining.

Description

technical field [0001] The invention belongs to the technical field of ultra-precision machining of microlens optical elements, and in particular relates to a fixed-point rotary cutting method for off-axis microlens machining. Background technique [0002] Small and compact microlens parts can well meet the increasingly complex and sophisticated requirements of optical imaging and optical measurement. At present, microlens parts have been widely used in military, medical, energy and other fields. With the expansion of application breadth and deepening of application depth, the surface structure of microlens parts is designed more and more complex, and the materials used are more difficult for ultra-precision processing, such as single crystal germanium aspheric convex lens array parts, mold steel aspheric concave lens Array optical mold, etc. These complex microlens parts not only put forward new requirements for processing methods, but also challenge the processing accurac...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B23B1/00
CPCB23B1/00
Inventor 赵清亮王爱博郭兵潘永成
Owner HARBIN INST OF TECH
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