Heating device used in vacuum device

Abstract

The invention discloses a heating device used in a vacuum device and relates to the field of heating a sample in the vacuum device. The heating device includes: a heating component which is a dual-heat-source heating component for heating a sample to be heated; a thermal insulation component which includes a three-layer covered thermal insulation radiation shielding structure and a ceramic thermalinsulation base and is configured to perform a thermal insulation treatment; a support member which is a stainless steel base and configured to support the heating component and the thermal insulation component; and a hot electron suppression system which is configured to suppress the escape of hot electrons on the surface of the sample to be heated. The heating device is suitable for use in thevacuum device, especially in a scanning electron microscope. The heating device has a small size, high heating efficiency, a fast temperature rise speed, and a good heat source isolation and thermal insulation effect, controls the influence of hot electrons on the electron beam of the scanning electron microscope, achieves clear high-temperature images, and does not affect the normal use of otheraccessories of the scanning electron microscope.

Description

technical field [0001] The invention relates to the field of heating samples in vacuum equipment, in particular to a desktop scanning electron microscope and a heating device used in vacuum equipment in the scanning electron microscope. Background technique [0002] When the material is served at high temperature, microstructural instability is one of the key reasons leading to the failure of service performance. This is especially prominent for metal materials serving under high temperature conditions. In order to study the evolution mechanism of the microstructure of materials in service at high temperatures, some experimental devices for the evolution of materials microstructures under pseudo-high temperature conditions have been developed and applied. Optical microscope (OM), especially scanning electron microscope (SEM) is the main analytical instrument for testing and analyzing the microstructure of metal materials, which promotes the rapid development of in-situ heat...

AI Technical Summary

Problems solved by technology

These in-situ heating stages have defects such as large volume, overweight, slow heating rate, poor heat insulation effect, and serious thermal electron radiation of the sample, which seriously affect the normal use of scanning electron microscopes. It is necessary to develop fast heating rate, small size, and light weight. , full-featured heating device

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