Evaporation device and evaporation method thereof

Abstract

The invention provides an evaporation device and an evaporation method of the evaporation device. The evaporation method is used for evaporating organic light emitting materials. The device comprisesan evaporation source, the evaporation source comprises a crucible which contains the organic light emitting materials, a nozzle arranged on the top of he crucible and a heating part arranged at the bottom of the crucible, the nozzle is used for outputting gasified organic light emitting materials, the heating part is used for heating the bottom of the crucible so as to gasify the organic light emitting materials, the device further comprises a heat adjusting mechanism, and the heat adjusting mechanism is arranged the side, away from the crucible, of the heating part and used for automaticallyadjusting the self opening rate so as to adjust the reflection rate for the heat of the heating part. According to the evaporation device, by automatically adjusting the self opening rate of the heatadjusting mechanism, the reflection rate of the heat of the heating part is automatically adjusted, it is ensured that the heating part evenly heats the bottom of the crucible, and therefore uniformity of evaporated film thicknesses is ensured.

Description

technical field [0001] The invention belongs to the field of display technology, and in particular relates to an evaporation device and an evaporation method thereof. Background technique [0002] OLED (Organic Light-Emitting Diode, organic light-emitting diode) has received more and more attention, research and investment in the field of display technology due to its advantages such as self-illumination, wide viewing angle, high contrast, low power consumption, and extremely high response speed. It is widely considered by the industry to be a new next-generation display technology. However, as a high-end display, it is still difficult to achieve mass production of OLED displays. At present, vacuum evaporation of organic light-emitting materials is mostly used. [0003] Vacuum evaporation technology refers to heating the organic luminescent material through a linear evaporation source to vaporize it under vacuum conditions. The organic luminescent material is sprayed out th...

AI Technical Summary

Problems solved by technology

However, in the vacuum evaporation process, the evaporation rate of organic light-emitting materials is easily affected by many factors, which in turn will affect the film thickness uniformity of OLED materials.

The film thickness uniformity of organic light-emitting materials is crucial to the performance of OLED devices. If the film thickness uniformity is poor, the color shift problem of OLED devices will be more serious, such as blueness at small viewing angles, and serious color shift problems in a certain row of cells on the glass substrate. , affecting the yield rate, which in turn affects the production capacity

In production, the standard of film thickness uniformity is often formulated. Once the established standard is exceeded, the production has to be stopped, otherwise large-scale defective products will be brought

[0004] For example, the stability of the linear evaporation source will affect the film thickness uniformity of the organic luminescent material. For different linear evaporation sources, the structural design is similar, and they are all composed of a heating system (Heater) and a cooling system (cooling water). , through the arrangement of its Heater and cooling water to ensure uniform heating, so as to ensure uniform film thickness, the evaporation source with a reasonable structural design, its stability is often good, and its film thickness adjustment is easy, but even if the structural design is reasonable The evaporation source, only relying on the arrangement of Heater and cooling water to adjust the uniformity of film thickness inevitably has certain limitations

In production, if the heating and control range of the evaporation source is exceeded and the uniformity of the film thickness is poor, the line is often stopped to find out the cause and then solve the problem, which affects the continuity of production and consumes time and money.

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