Semiconductor Processing Equipment
A technology for processing equipment and semiconductors, which is applied in semiconductor/solid-state device manufacturing, metal material coating process, coating, etc. It can solve the problems of smoke from the furnace door, black edges of sheet materials, and large size, and achieve flexible adjustment. and control effects
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[0038] Such as Figure 1 to Figure 6 As shown, the semiconductor processing equipment includes a furnace body 1, a furnace door 2, and an electrode structure is arranged on the furnace door 2. The electrode structure includes an electrode column 3-7, an electrode body 3-5 and an insulating material. The electrode column 3-7 is connected with the electrode main body 3-5, and the insulating material covers the side of the electrode column 3-7. By insulating and covering the electrode columns, only two ends of the electrode columns 3-7 are exposed. It will be more convenient when the furnace door 2 is connected to the electrode structure in the graphite boat, and it will be easier to form a uniform electric field and realize plasma-enhanced chemical vapor phase. deposition. Such as figure 1As shown, the graphite boat will be placed in parallel in the furnace body 1, and the silicon wafers on the graphite boat will also be placed in parallel. This placement structure has higher...
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