Monocrystalline silicon growth furnace with high safety performance
A technology of safety performance and growth furnace, applied in the direction of single crystal growth, single crystal growth, crystal growth, etc., can solve problems such as major safety hazards, achieve the effects of increasing service life, convenient cleaning, and improving work efficiency
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Embodiment 1
[0029] like Figure 1-4 As shown, a single crystal silicon growth furnace with high safety performance includes a growth furnace as a whole 1, and the growth furnace as a whole 1 includes a lifting and rotating system 2, an upper furnace cover 3 and a lower furnace body 4, and the pulling and rotating system 2 is located in the upper furnace The upper end of the cover 3, the upper furnace cover 3 is provided with a lifting rope 5, the upper end of the lifting rope 5 is connected with the lower end of the lifting rotation system 2, the lower end of the lifting rope 5 is connected with a single crystal rod 10, and the lower furnace body 4 includes a graphite heater 8 and a quartz crucible 9, the single crystal rod 10 is located in the quartz crucible 9, the outer surface of the quartz crucible 9 is provided with a graphite heater 8, the graphite heater 8 is provided with a heat preservation cover 7, and the lower furnace body 4 The lower end is provided with an air inlet 13 .
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Embodiment 2
[0037] like figure 1 , Figure 5 , Image 6 As shown, a single crystal silicon growth furnace with high safety performance includes a growth furnace as a whole 1, and the growth furnace as a whole 1 includes a lifting and rotating system 2, an upper furnace cover 3 and a lower furnace body 4, and the pulling and rotating system 2 is located in the upper furnace The upper end of the cover 3, the upper furnace cover 3 is provided with a lifting rope 5, the upper end of the lifting rope 5 is connected with the lower end of the lifting rotation system 2, the lower end of the lifting rope 5 is connected with a single crystal rod 10, and the lower furnace body 4 includes a graphite heater 8 and a quartz crucible 9, the single crystal rod 10 is located in the quartz crucible 9, the outer surface of the quartz crucible 9 is provided with a graphite heater 8, the graphite heater 8 is provided with a heat preservation cover 7, and the lower furnace body 4 An air inlet 13 is provided a...
Embodiment 3
[0043] like figure 1 , Figure 7 As shown, a single crystal silicon growth furnace with high safety performance includes a growth furnace as a whole 1, and the growth furnace as a whole 1 includes a lifting and rotating system 2, an upper furnace cover 3 and a lower furnace body 4, and the pulling and rotating system 2 is located in the upper furnace The upper end of the cover 3, the upper furnace cover 3 is provided with a lifting rope 5, the upper end of the lifting rope 5 is connected with the lower end of the lifting rotation system 2, the lower end of the lifting rope 5 is connected with a single crystal rod 10, and the lower furnace body 4 includes a graphite heater 8 and a quartz crucible 9, the single crystal rod 10 is located in the quartz crucible 9, the outer surface of the quartz crucible 9 is provided with a graphite heater 8, the graphite heater 8 is provided with a heat preservation cover 7, and the lower furnace body 4 An air inlet 13 is provided at the lower ...
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