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Environment-friendly technology for directly coating oxidizable metal

It is an easy-to-oxidize metal and environmentally friendly technology. It is used in metal material coating technology, sputtering plating, ion implantation plating, etc. It can solve problems such as coating limitations, and achieve good corrosion resistance, reasonable design and good hydrophobicity. Effect

Inactive Publication Date: 2019-12-13
宁波丽成真空科技有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0002] Aluminum alloys and copper alloys are widely used in metals, but because of their easy oxidation, they generally need to be protected by electroplating processes to maintain good corrosion resistance and coating adhesion in the future, which limits the coating of such products.

Method used

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  • Environment-friendly technology for directly coating oxidizable metal
  • Environment-friendly technology for directly coating oxidizable metal

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0020] A process of direct coating on easy-to-oxidize metals by using HIPIMS sputtering metallic glass combined with multi-arc ion plating:

[0021] 1. Take the copper material and carry out water-based degreasing cleaning first, and then dry it with cold air after cleaning;

[0022] 2. Put it into the vacuum coating equipment and start pumping. When the pressure is less than 3 Pa, turn on the heating and bake at 150 degrees; continue pumping after 30 minutes, and start after the basic vacuum pressure is lower than 5*10-3 Pa. The following process;

[0023] 3. When the argon gas vacuum reaches 1-2Pa, the bias voltage is turned on, and the voltage is gradually increased from 450V to 1000V, and the surface is cleaned by ion bombardment. The total time is 15-20 minutes, after which the bias voltage is turned off;

[0024] 4. Introduce argon gas 2-3 *10-1Pa, turn on the bias voltage, set 400-450V, turn on the HIPIMS sputtering power supply, the target can be zirconium-based meta...

Embodiment 2

[0028] A process using HIPIMS sputtering metallic glass combined with multi-arc ion plating to directly coat easily oxidizable metals (increase ion source):

[0029] 1. Take the copper material and carry out water-based degreasing cleaning first, and then dry it with cold air after cleaning;

[0030] 2. Put it into the vacuum coating equipment and start pumping. When the pressure is less than 3Pa, turn on the heating and bake at 150 degrees for 30 minutes, then continue pumping. After the basic vacuum pressure is lower than 5*10-3Pa, start the following process;

[0031] 3. When the argon gas vacuum reaches 1-2Pa, turn on the pressure, the voltage is gradually increased from 450V to 1000V, and the surface is cleaned by ion bombardment. Total time 15-20 minutes. Then turn off the bias;

[0032] 4. Turn off the argon gas, after the pressure is lower than the basic vacuum, add argon until the vacuum degree is 3-5*10-1Pa, turn on the ion source (Hall ion source, Kaufmann ion so...

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Abstract

The invention relates to an environment-friendly technology for directly coating oxidizable metal. The technology comprises the following steps of 1, degreasing and cleaning a workpiece; 2, fixing andplating a clamp; 3, performing vacuumizing; 4, cleaning a bias plasma; 5, cleaning an ion source plasma; 6, performing coating of a TFMG implanting layer; 7, performing coating of a TFMG protective layer; 8 performing coating of a decorative or functional target coating. Due to the fact that the metal glass has the advantages of being compact, good in hydrophobicity and good in corrosion resistance, the metal glass can be adopted as the protective coating for protecting a base material.

Description

technical field [0001] The invention relates to a coating process, in particular to an environment-friendly process for directly coating easy-to-oxidize metals. Background technique [0002] Aluminum alloy and copper alloy are widely used in metal products, but because of their easy oxidation, in order to maintain good corrosion resistance and coating adhesion in the future, they generally need to be protected by electroplating process first, which limits the coating of such products. Contents of the invention [0003] Regarding the current situation of the above-mentioned prior art, the technical problem to be solved by the present invention is to provide a protective layer of metallic glass (TFMG) made by HiPIMS high-energy-density sputtering, plus a decorative or functional coating, so as to realize direct oxidation of easily oxidized metals. The coating process is completed in a single vacuum coating equipment. [0004] The technical solution adopted by the present in...

Claims

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Application Information

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IPC IPC(8): C23C14/35C23C14/02C23C14/16C23C14/32
CPCC23C14/022C23C14/165C23C14/325C23C14/35
Inventor 曾浩恩谭天明
Owner 宁波丽成真空科技有限公司
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