A Spectral Confocal Displacement Sensor Based on Chirped Fiber Bragg Grating
A chirped fiber grating and displacement sensor technology, applied in the field of spectral confocal displacement sensors, can solve the problems of increasing the complexity of the sensor measurement system, the complexity of the process design of the dispersion objective lens, and the unfavorable precision measurement, etc., to achieve enhanced maintainability, strong Effect of stray light immunity and system cost reduction
Active Publication Date: 2021-03-30
HEFEI UNIV OF TECH
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Problems solved by technology
[0004] It is precisely because the traditional spectral confocal displacement sensor measurement system has high requirements on the parameters such as chromatic aberration of the dispersion objective lens, which increases the complexity of the entire sensor measurement system, and the process design of the dispersion objective lens is complicated and the processing cost is high.
It is not conducive to the development of precision measurement in the direction of miniaturization, precision and low consumption
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[0040] See figure 1 The structural form of the spectral confocal displacement sensor based on the chirped fiber grating in this embodiment is:
[0041] In the sensor, a dispersion confocal detection system is provided, and the system configuration includes: a light source 1, a three port fiber annular device 2, a first 啁啾 fiber grating 3, a first fiber isolator 4, a four-port fiber circumen, a pinhole 6, The lens 7, the object 8, the second chirped fiber grating 9, the second fiber isolator 10, and the spectrometer 11.
[0042] Such as figure 1 As shown, the output of the light source 1 is connected by the optical fiber and the three-port fiber circular carrier input terminal 201, and the three port fiber annulus first output terminal 202 connects the first chirped fiber grating input terminal, the three port fiber loop second output 203 is connected to the four-port fiber circulator input 501, and the output signal of the four-port annular first output port 502 is sequentially ...
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Abstract
The invention discloses a spectral confocal displacement sensor based on a chirped fiber bragg grating. A first chirped fiber bragg grating and a second chirped fiber bragg grating are symmetrically arranged in a spectral confocal displacement sensor measurement system; an optical signal emitted by a light source is reflected by the first chirped fiber bragg grating to obtain dispersion characteristics; the optical signal with the dispersion characteristics is projected to a measured object through a three-port circulator, a pinhole and a focusing lens. Light with the wavelength of lambda in the optical signal meets the confocal condition, and is focused on the surface of the measured object; the focused light signal is received by the pinhole after returning along an original light path,then is received by a spectrograph after being reflected by the second chirped fiber bragg grating, and finally is converted into a corresponding distance value according to the wavelength, so the information of the position of the measured object is obtained. In the system, the focusing lens directly replaces a dispersion objective lens with a complex structure, the miniaturization of a precisionmeasurement system is achieved, and the measurement system has high measurement precision and resolution.
Description
Technical field [0001] The present invention relates to the field of precision measurement, and more particularly to a spectral confocal displacement sensor, in particular to the positioning of the object to be tested, the surface profile measurement of the object, and the size of the precision mechanical component. Background technique [0002] The spectral confocal displacement sensor is a non-contact displacement sensor based on wavelength displacement modulation in recent years. The accuracy of the precision is over the submicron, the operating frequency reaches the medircin. [0003] The working principle of the conventional spectral confocal displacement sensor is to establish a correspondence between the distance and the wavelength by optical dispersion principle, using the spectrometer to decode the spectral information, thereby obtaining location information; it is mainly composed of dispersion objective, light source and spectrometer. The dispersion objective is the cor...
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IPC IPC(8): G01B11/02
CPCG01B11/02
Inventor 钟翔桂栋梁董敬涛邓华夏张进马孟超
Owner HEFEI UNIV OF TECH