Vacuum cavity assembly for scattering experiment station

Abstract

The invention provides a vacuum cavity assembly for a scattering experiment station. The vacuum cavity assembly comprises a vacuum cavity body, a corrugated pipe connected to the front end of the vacuum cavity body, a light-transmitting window arranged at the rear end of the vacuum cavity body, two sets of two-dimensional motion platforms arranged at the bottom of the vacuum cavity assembly, a first beam stopper, a second beam stopper, and photodiodes; a polyimide film is fixed at the light-transmitting window; the first beam stopper and the second beam stopper are respectively connected withthe two-dimensional motion platforms through a connecting device; the photodiodes are respectively arranged on the first beam stopper and the second beam stopper and are used for measuring light intensity; and the first beam blocker and the second beam blocker can move simultaneously or separately, and meet the requirements of three kinds of experiments, namely, SAXS (small-angle X-ray scattering)experiments, GISAXS (grazing incidence small-angle X-ray scattering) experiments and low-resolution XRR (X-ray reflectivity) experiments at the same time. The vacuum cavity assembly can realize largeq value measurement of a sample, and is simple in structure and easy to maintain. The beam stoppers can be flexibly disassembled, so that different experiment requirements of different users are met;and hardware conditions are provided for the automatic sample matching of the GISAXS experiment of the experiment station.

Description

technical field [0001] The invention relates to the field of vacuum chamber devices, in particular to a vacuum chamber assembly for a scattering experiment station. Background technique [0002] The grazing incidence small-angle X-ray experimental technique is an experimental method for testing thin film samples. During the test, X-rays are incident on the surface of the sample at a certain grazing incidence angle, and the penetration depth of X-rays is adjusted by adjusting the grazing incidence angle to study the sample. Distribution of structures at different depths on the surface or surface layer. The grazing incidence small-angle X-ray experimental technique can be used to test the density, thickness, roughness, crystallite size and grain orientation of thin film samples. In the grazing incidence experiment, the X-rays passing through the sample are reflected and refracted on the surface of the sample, and the refracted light enters the interior of the sample, and is r...

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Problems solved by technology

[0004] The purpose of the present invention is to provide a vacuum chamber assembly for a scattering experiment station, so as to solve the problem that the vacuum chamber in the prior art cannot meet the requirements of the three experimental methods of the small-angle scattering experiment station SAXS, GISAXS and low-resolution XRR at the same time. asked questions

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