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Preparing method of FeAlCoCuNiV high-entropy alloy target hot isostatic pressure moulding

A hot isostatic pressing, high entropy alloy technology, applied in metal material coating process, ion implantation plating, coating and other directions, can solve the problem of poor infiltration of powder grain boundaries, low density, poor machining and forming performance, etc. It can reduce the formation probability of internal defects, avoid the segregation of components and tissues, and eliminate oxidation problems.

Inactive Publication Date: 2020-01-10
SINO EURO MATERIALS TECH OF XIAN CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] In the preparation process of traditional targets, the process route of mixing elemental metal powder + pressing molding process is often directly adopted. In this process, it usually occurs: powder oxidation, various components and structure segregation, poor powder grain boundary infiltration resulting in intergranular Pores and other problems will eventually lead to problems such as many defects in the prepared target, low density, poor machining and forming performance, etc.

Method used

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  • Preparing method of FeAlCoCuNiV high-entropy alloy target hot isostatic pressure moulding
  • Preparing method of FeAlCoCuNiV high-entropy alloy target hot isostatic pressure moulding

Examples

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Effect test

Embodiment 1

[0028] Example 1, such as Figure 1-2 As shown, a method for preparing FeAlCoCuNiV high-entropy alloy target hot isostatic pressing is specifically implemented according to the following steps:

[0029] Step 1. Selection and proportioning of alloy raw materials;

[0030] Step 2. Carrying out non-consumable vacuum smelting of the proportioned alloy raw materials;

[0031] Step 3. powdering the alloy smelting ingot obtained in step 2;

[0032] Step 4. Encapsulating the alloy powder through a sheath;

[0033] Step 5. Carrying out hot isostatic pressing of the sheath containing the alloy powder to obtain a billet;

[0034] Step 6. Remove the cladding from the billet by machining and process it to a specific size to obtain a high-entropy alloy target.

[0035] Step 1 is specifically: select Fe, Al, Co, Cu, Ni, V bulk metals with a purity greater than 99.9%, and mix them according to the atomic equimolar ratio to obtain alloy raw materials;

[0036] Step 2 is specifically: in a...

Embodiment 2

[0044] The only difference between this example and Example 1 is:

[0045] Step 2 is specifically: in a non-consumable vacuum melting furnace (WK-П type), melt the mixed alloy raw materials to obtain alloy ingots; the melting current is 250A, and the melting is carried out in an argon atmosphere at 1Pa. , the number of times is 8 times, and an alloy ingot with uniform distribution of raw material components can be obtained.

[0046] Step 3 is specifically: the powdering treatment is refined by mechanical stamping, and the ingot is crushed, and then the mechanical vacuum ball milling method is used for ball milling and powder mixing. The alloy powder was ball milled for 1 h in an air atmosphere, and the grain size of the obtained alloy powder was 30 μm.

[0047] In step 5, the temperature of the hot isostatic pressing is 910°C, the holding time is 2h, the pressure is 140Mpa, and the temperature out of the furnace is lower than 300°C.

Embodiment 3

[0049] The only difference between this example and Example 1 is:

[0050] Step 2 is specifically: melting the mixed alloy raw materials in a non-consumable vacuum melting furnace to obtain alloy ingots; the melting current is 250A, and the melting is carried out in an argon atmosphere at 1Pa, and the number of times is 6 times.

[0051] Step 3 is specifically: the powdering treatment is refined by mechanical stamping, and the ingot is crushed, and then the mechanical vacuum ball milling method is used for ball milling and powder mixing. The alloy powder was ball milled for 2 hours in an air atmosphere, and the grain size of the obtained alloy powder was 20 μm.

[0052] In step 5, the temperature of the hot isostatic pressing is 900°C, the holding time is 2.2h, the pressure is 130Mpa, and the temperature out of the furnace is lower than 300°C.

[0053] In the preparation process of alloy targets, through vacuum melting of Fe, Al, Co, Cu, Ni, V alloys, powdering of alloy ingot...

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Abstract

The invention discloses a preparing method of FeAlCoCuNiV high-entropy alloy target hot isostatic pressure moulding. The method comprises the steps of firstly, alloy raw material selection and proportioning; secondly, non-self-consumption vacuum smelting of a proportioned alloy raw material; thirdly; smelting, ingot casting and pulverizing of alloy obtained in the second step; fourthly, packagingof the alloy powder through a sheath; fifthly, hot isostatic pressure moulding of the sheath containing alloy powder, and obtaining a rod blank; and sixthly, machining of the rod blank to remove the sheath, machining to the specific size, and obtaining a high-entropy alloy target. Before the target powder is sintered, through smelting treatment of a non-self-consumption vacuum smelting furnace, atoms in a target are sufficiently fused, generation of composition and tissue segregation can be avoided, in the manufacturing process, in the process from alloy smelting to powder hot isostatic pressuring, the operation is carried out in the vacuum mixed inert gas protection, and the oxidation problem in the target preparing process can be completely eradicated.

Description

technical field [0001] The invention belongs to the technical field of metal powder processing, and relates to a method for preparing FeAlCoCuNiV high-entropy alloy target hot isostatic pressing. Background technique [0002] High-entropy alloy is a multi-principal, high-mixing-entropy alloy prepared by five or more metal and non-metal elements in an equimolar or nearly equimolar ratio. It has excellent mechanics, chemistry, electromagnetism and high temperature resistance. Oxidation and other advantages, especially in the field of magnetic recording media, more and more show its superiority. [0003] In the preparation process of traditional targets, the process route of mixing elemental metal powder + pressing molding process is often directly adopted. In this process, it usually occurs: powder oxidation, various components and structure segregation, poor powder grain boundary infiltration resulting in intergranular Pores and other problems eventually lead to problems suc...

Claims

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Application Information

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IPC IPC(8): C23C14/35B22F9/04B22F3/15
CPCB22F3/15B22F9/04B22F2009/043C23C14/3414C23C14/35
Inventor 郑作赟瞿宗宏宋嘉明罗成白瑞敏何山王庆相赖运金梁书锦
Owner SINO EURO MATERIALS TECH OF XIAN CO LTD