A detection device and detection method for quickly detecting and identifying surface defects of an optical element

Abstract

The invention discloses a detection device and detection method for quickly detecting and identifying surface defects of an optical element. The device mainly comprises a laser, a light beam shaper, abeam expander, a reflector, a convergent lens, a sample, an XY precision displacement platform, a zoom lens, an electric light path switcher, a first imaging lens, a long-wave-pass filter, a first area array photoelectric detector, a collimator, a tunable filter, a second imaging lens, a second area array photoelectric detector and a computer. Defects are imaged by utilizing photoluminescence characteristics of the defects, and rapid detection is realized; and in combination with the hyperspectral imaging technology, the device and method can identify various defects according to the peak characteristics of the luminescence spectrum of the defects, and judge the types of the defects. The detection device designed by the invention integrates rapid detection and identification, and is verysuitable for detection of surface defects of large-aperture optical elements.

Description

technical field [0001] The invention relates to the field of defect detection, in particular to a detection device and a detection method for rapid detection and identification of surface defects of optical elements. Background technique [0002] The laser-induced damage problem of optical components used in large-scale high-power laser devices seriously restricts the improvement of system output flux. The damage of optical components is mainly caused by various defects introduced during the growth stage of optical materials and processing processes such as grinding and polishing. Metal ions Fe introduced during crystal growth 3+ 、Al 3+ 、Cr 3+ , Sb 3+ , Ca 2+ , Pb 2+ 、Si 4+ The light-absorbing centers formed by other impurities lead to the disorder of the local lattice, resulting in the generation of impurity levels in the band gap. During the polishing process of neodymium glass, fused silica glass and other components, the polishing liquid remains on the surface of...

AI Technical Summary

Problems solved by technology

However, the photothermal weak absorption tester has a very slow measurement speed and cannot be applied to the rapid detection of surface defects of large-diameter components.

Moreover, this method cannot distinguish defect categories, and cannot analyze the source of defects, resulting in the inability to provide guidance for process improvement

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