Method for texturing silicon wafer by repeatedly utilizing black silicon cleaning solution

Abstract

The invention discloses a method for texturing a silicon wafer by repeatedly utilizing a black silicon cleaning solution. The method comprises the following steps of (1) immersing the silicon wafer into a texturing solution containing 0.01-200 mmol / L of metal ion salt, 1-10 mol / L of hydrofluoric acid and 0.1-10 mol / L of black silicon for texturing; (2) cleaning the textured silicon wafer with thedeionized water, and blow-drying the textured silicon wafer; (3) cleaning the dried silicon wafer obtained in the step (2) by adopting a 20-80wt% nitric acid solution to remove the metal particles deposited on the surface of the silicon wafer; (4) cleaning the silicon wafer cleaned by the black silicon cleaning solution with the deionized water, and blow-drying to obtain the silicon wafer with a suede structure; and (5) repeating the steps (1) to (4) until the black silicon cleaning solution reaches the service life, and preparing the black silicon texturing solution by taking the black silicon cleaning solution reaching the service life as a raw material. According to the method, the black silicon cleaning solution, especially the metal ions in the black silicon cleaning solution, can besimply and effectively recycled, so that the texturing cost and the wastewater treatment cost are reduced, and the method is green and environment friendly.

Description

technical field [0001] The invention relates to the field of semiconductors, in particular to a method for making texture on a silicon chip by repeatedly using a black silicon cleaning solution. Background technique [0002] Because of its large reserves and wide distribution, solar energy is of great significance to improving the existing energy structure. Solar power generation mainly uses solar cells to convert solar energy into electrical energy. Among them, silicon-based solar cells are currently the most widely used solar cells. Silicon-based solar cells mainly include monocrystalline silicon solar cells and polycrystalline silicon solar cells. [0003] At this stage, for monocrystalline silicon solar cells and polycrystalline silicon solar cells, diamond wire slicing technology can significantly reduce the cost of slicing silicon ingots, and ultimately reduce the cost of photovoltaic modules. However, the diamond wire slicing technology has not been fully applied i...

AI Technical Summary

Problems solved by technology

However, in order to achieve the recovery and utilization of these metal ions, it is usually necessary to set up an additional metal recovery and treatment system, which requires high costs.

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