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Al-Sc-X multi-element alloy target material and preparation method thereof

A multi-element alloy, al-sc-x technology, applied in metal material coating process, ion implantation plating, coating and other directions, to achieve the effect of improving heat resistance, improving electromagnetic shielding performance, and broadening the scope of application

Pending Publication Date: 2020-01-21
CHANGSHA XUNYANG NEW MATERIAL TECH CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Therefore, how to design ternary and above aluminum-scandium-based alloy targets and prepare them into targets is rarely involved in the prior art.

Method used

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  • Al-Sc-X multi-element alloy target material and preparation method thereof
  • Al-Sc-X multi-element alloy target material and preparation method thereof
  • Al-Sc-X multi-element alloy target material and preparation method thereof

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Effect test

Embodiment 1

[0033] Embodiment 1 of the present invention provides an Al-Sc-Cr ternary alloy target and a preparation method thereof. In terms of weight percentage, the Al-Sc-Cr alloy target includes 75% Al, 3% Sc and 22% Cr.

[0034]The steps of the preparation method of the Al-Sc-Cr ternary alloy target are as follows:

[0035] S1: Use an electronic balance to weigh Al powder with a weight percentage of 75%, Sc powder with a weight percentage of 3%, and Cr powder with a weight percentage of 22%, wherein the average particle size of the aluminum powder is 100 μm; scandium The average particle size of powder is 200μm; the average particle size of Cr powder is 100μm;

[0036] S2: Put the Al powder, Sc powder and Cr powder weighed in step S1 into a mixer for mixing. In order to ensure uniform mixing and no oxidation during the mixing process, the mixing cylinder needs to be sealed and filled with argon for protection, and the mixing time is 60 minutes;

[0037] S3: Open the mixing barrel,...

Embodiment 2

[0044] Embodiment 2 of the present invention provides an Al-Sc-Mg ternary alloy target and a preparation method thereof. In terms of weight percentage, the Al-Sc-Mg alloy target includes 98% Al, 1% Sc and 1% Mg.

[0045] The steps of the preparation method of the Al-Sc-Mg ternary alloy target are as follows:

[0046] S1: Use an electronic balance to weigh Al powder with a weight percentage of 98%, Sc powder with a weight percentage of 1%, and Mg powder with a weight percentage of 1%, wherein the average particle size of the aluminum powder is 2 μm; The average particle size of scandium powder is 10μm; the average particle size of Mg powder is 2μm;

[0047] S2: Put the Al powder, Sc powder and Mg powder weighed in step S1 into a mixer for mixing. In order to ensure uniform mixing and no oxidation during the mixing process, the mixing cylinder needs to be sealed and filled with nitrogen for protection, and the mixing time is 60 minutes;

[0048] S3: Open the mixing cylinder, ...

Embodiment 3

[0054] Embodiment 3 of the present invention provides an Al-Sc-W ternary alloy target and a preparation method thereof. In terms of weight percentage, the Al-Sc-W alloy target includes 50% Al, 48% Sc and 2% W.

[0055] The steps of the preparation method of the Al-Sc-W ternary alloy target are as follows:

[0056] S1: Use an electronic balance to weigh Al powder with a weight percentage of 50%, Sc powder with a weight percentage of 48%, and W powder with a weight percentage of 2%, wherein the average particle size of the aluminum powder is 20 μm; The average particle size of scandium powder is 20μm; the average particle size of W powder is 20μm;

[0057] S2: Put the Al powder, Sc powder and W powder weighed in step S1 into the mixer for mixing; in order to ensure uniform mixing and no oxidation during the mixing process, the mixing cylinder needs to be sealed and filled with nitrogen for protection , the mixing time is 60min;

[0058] S3: Open the mixing cylinder, put the m...

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Abstract

The invention belongs to the technical field of alloy target material and powder metallurgy material processing, and particularly provides an Al-Sc-X multi-element alloy target material. The Al-Sc-X alloy target material is composed of, by weight, 50%-98% of Al, 1%-48% of Sc and 1%-49% of X, wherein X is one or more of Si, Mg, Ti, V, Cr, Mn, Co, Ni, Cu, Y, Nb, Mo, Ta, W and Ag. The application range of the Al-Sc alloy target material can be expanded through the alloy target material. The invention further provides a preparation method of the Al-Sc-X multi-element alloy target material. According to the method, the alloy target material is prepared through powder metallurgy hot-pressing sintering, the problem that metallurgical bonding of metal and Al is difficult to achieve due to the factthat the difference between the melting point of the metal and the melting point of Al is large is solved, and the Sc and the X are not prone to oxidation reaction. The method is short in preparationprocess, accurate in technical parameter control and suitable for batch production.

Description

technical field [0001] The invention relates to the technical field of alloy target material and powder metallurgy material processing, in particular to an Al-Sc-X multi-element alloy target material and a preparation method thereof. Background technique [0002] Vacuum sputtering coating technology is an important technology for surface treatment and surface modification of various materials such as metals, ceramics, glass, polymers, etc. Through vacuum sputtering coating on the surface of various materials, various materials can be adjusted and improved. The physical and chemical properties of the surface can improve the service performance of materials in specific application scenarios. At present, vacuum sputtering coating technology has been widely used in many fields such as electronic semiconductor materials, medical materials, construction materials, tool and mold materials, etc. [0003] One of the key application technologies for the surface modification of materi...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C22C21/00C22C1/04C23C14/34
CPCC22C1/0416C22C21/00C23C14/3414
Inventor 余琨
Owner CHANGSHA XUNYANG NEW MATERIAL TECH CO LTD