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Ultra-precise hydrostatic pressure rotary table

A static pressure turntable, ultra-precision technology, applied in the direction of liquid cushion bearings, large fixed members, bearings, etc., can solve the problem of low utilization rate, the inability to further improve the accuracy and stiffness of the turntable, and the small proportion of the bearing oil chamber area, etc. problems, to achieve the effects of simple structure, improved ease of operation, and improved measurement accuracy

Inactive Publication Date: 2020-01-31
HARBIN INST OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] However, most of the hydrostatic turntables currently studied have bearings with separate axial thrust bearings and radial thrust bearings. In this structure, the area of ​​the bearing oil chamber is relatively small, and the utilization rate is not high. , so that the accuracy and stiffness of the turntable cannot be further improved

Method used

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  • Ultra-precise hydrostatic pressure rotary table
  • Ultra-precise hydrostatic pressure rotary table
  • Ultra-precise hydrostatic pressure rotary table

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Experimental program
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Effect test

specific Embodiment approach 1

[0032] An ultra-precision hydrostatic turntable, including a workbench 1, a circular grating 2, a reading head 3, a bearing rotor 4, a bearing stator 5, a motor 6, a base 7 and a housing 9, and the workbench 1 is fixed on the bearing rotor 4 The upper surface of the bearing rotor 4 is provided with a trapezoidal ring groove on the outer surface of the bearing rotor 4. The bearing stator 5 is matched and sleeved in the trapezoidal ring groove and is in contact with the bearing rotor 4. There are several communication channels on the bearing stator 5. The oil hole 8 on the inner surface and the outer peripheral surface, the bearing stator 5 is fixedly connected to the base 7 arranged below it, the motor 6 is fixed on the base 7 and drives the bearing rotor 4 to rotate, and the housing 9 is located in the bearing The outer side of the stator 5, the bearing stator 5 is provided with an outer circular surface matching the inner surface of the housing 9, the housing 9 is fixed on the...

specific Embodiment approach 2

[0045] like figure 1 As shown, in this embodiment, the angle deviation between the angle of the conical inclined surface of the middle and upper part 412 of the upper bearing rotor 41 and the angle of the conical inclined surface of the lower bearing rotor 42 does not exceed 1°, mainly by grinding the upper bearing rotor 41 and the lower bearing rotor The inclined surface of 42, and the consistency of the two inclined angles are ensured by grinding the upper and lower surfaces of the rotor washer 43, such design is conducive to improving the rigidity and precision of the turntable. The rest of the structure is the same as the first embodiment.

specific Embodiment approach 3

[0047] like figure 1 As shown, in this specific embodiment, the distance deviation between the conical inclined surface of the upper bearing rotor 41 and the lower bearing rotor 42 and the inner conical surface of the bearing stator 5 does not exceed 1 μm, mainly by grinding the upper and lower sides of the rotor washer 43 Superficially guaranteed. In this way, the high precision of the bearing parts and the assembly of the parts can be realized, which in turn helps to improve the rigidity and precision of the turntable. The rest of the structure is the same as the first embodiment.

[0048] working principle:

[0049] When working, first hydraulic oil enters and fills the corresponding fan-shaped oil chamber groove 51 through the oil inlet 91, the annular oil delivery groove 52, the oil delivery hole 81 and the oil inlet hole 82, and the upper bearing rotor 41, the lower bearing rotor 42 and the A hydrostatic oil film is formed in the gap between the mating surfaces of the...

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Abstract

The invention provides an ultra-precise hydrostatic pressure rotary table in order to improve the precision and the rigidity of the rotary table, and belongs to the technical field of ultra-precise manufacturing equipment. According to the specific scheme, the ultra-precise hydrostatic pressure rotary table comprises a workbench, a circular grating, reading heads, a bearing rotor, a bearing stator, a motor, a shell body and a base; and the workbench is fixed to the upper surface of the bearing rotor, the circular grating sleeves the bearing rotor, the reading heads are fixed to the shell bodyand opposite to the circular grating, a trapezoidal groove is formed in the circumferential direction of the bearing rotor, the bearing stator is sleeved with the trapezoidal groove in a matched manner and makes contact with the bearing rotor, multiple oil through holes communicating with the inner surface and the peripheral face are formed in the bearing stator, the bearing stator is fixedly connected with the base, and the motor is fixed to the base and drives the bearing rotor to rotate. The hydrostatic pressure rotary table is simple in structure and easier to assemble, has higher precision and rigidity and is beneficial for improving the overall performance of an ultra-precise machine tool.

Description

technical field [0001] The invention belongs to the technical field of ultra-precision manufacturing equipment, and in particular relates to an ultra-precision hydrostatic turntable. Background technique [0002] Ultra-precision machine tools are an important direction for the development of machine tools today. The processing quality of parts is directly determined by the processing performance of machine tools, especially for some parts with complex structures. The traditional three-axis ultra-precision machine tools can no longer meet the processing requirements. The four- and five-axis ultra-precision machine tools developed by China represent the level of a country's high-end manufacturing industry. At the same time, they are also products that Western developed countries have embargoed on my country, and strict technical blockades have been implemented. The ultra-precision hydrostatic turntable is one of the core key components of the four- and five-axis ultra-precision...

Claims

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Application Information

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IPC IPC(8): B23Q1/25F16C32/06
CPCB23Q1/25F16C32/0629
Inventor 张瑞涛孙涛刘长在王浩史德权
Owner HARBIN INST OF TECH