Ultra-precise hydrostatic pressure rotary table
A static pressure turntable, ultra-precision technology, applied in the direction of liquid cushion bearings, large fixed members, bearings, etc., can solve the problem of low utilization rate, the inability to further improve the accuracy and stiffness of the turntable, and the small proportion of the bearing oil chamber area, etc. problems, to achieve the effects of simple structure, improved ease of operation, and improved measurement accuracy
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specific Embodiment approach 1
[0032] An ultra-precision hydrostatic turntable, including a workbench 1, a circular grating 2, a reading head 3, a bearing rotor 4, a bearing stator 5, a motor 6, a base 7 and a housing 9, and the workbench 1 is fixed on the bearing rotor 4 The upper surface of the bearing rotor 4 is provided with a trapezoidal ring groove on the outer surface of the bearing rotor 4. The bearing stator 5 is matched and sleeved in the trapezoidal ring groove and is in contact with the bearing rotor 4. There are several communication channels on the bearing stator 5. The oil hole 8 on the inner surface and the outer peripheral surface, the bearing stator 5 is fixedly connected to the base 7 arranged below it, the motor 6 is fixed on the base 7 and drives the bearing rotor 4 to rotate, and the housing 9 is located in the bearing The outer side of the stator 5, the bearing stator 5 is provided with an outer circular surface matching the inner surface of the housing 9, the housing 9 is fixed on the...
specific Embodiment approach 2
[0045] like figure 1 As shown, in this embodiment, the angle deviation between the angle of the conical inclined surface of the middle and upper part 412 of the upper bearing rotor 41 and the angle of the conical inclined surface of the lower bearing rotor 42 does not exceed 1°, mainly by grinding the upper bearing rotor 41 and the lower bearing rotor The inclined surface of 42, and the consistency of the two inclined angles are ensured by grinding the upper and lower surfaces of the rotor washer 43, such design is conducive to improving the rigidity and precision of the turntable. The rest of the structure is the same as the first embodiment.
specific Embodiment approach 3
[0047] like figure 1 As shown, in this specific embodiment, the distance deviation between the conical inclined surface of the upper bearing rotor 41 and the lower bearing rotor 42 and the inner conical surface of the bearing stator 5 does not exceed 1 μm, mainly by grinding the upper and lower sides of the rotor washer 43 Superficially guaranteed. In this way, the high precision of the bearing parts and the assembly of the parts can be realized, which in turn helps to improve the rigidity and precision of the turntable. The rest of the structure is the same as the first embodiment.
[0048] working principle:
[0049] When working, first hydraulic oil enters and fills the corresponding fan-shaped oil chamber groove 51 through the oil inlet 91, the annular oil delivery groove 52, the oil delivery hole 81 and the oil inlet hole 82, and the upper bearing rotor 41, the lower bearing rotor 42 and the A hydrostatic oil film is formed in the gap between the mating surfaces of the...
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