Halogen gas removing agent, method for producing same, removal device, monitoring method and removal method

A technology of halogen gas and remover, which is applied in the field of consumables, can solve problems that have not been raised, and achieve the effects of preventing major failures, reducing maintenance costs, and reducing the cost of consumables

Inactive Publication Date: 2020-02-11
CLARIANT CATALYSTS JAPAN
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0013] As mentioned above, with regard to the solid dry treatment agent, although the improvement of the removal ability can be seen, the reality is that there is no technology that satisfies all the requirements of (1) to (3)

Method used

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  • Halogen gas removing agent, method for producing same, removal device, monitoring method and removal method
  • Halogen gas removing agent, method for producing same, removal device, monitoring method and removal method
  • Halogen gas removing agent, method for producing same, removal device, monitoring method and removal method

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0160] Remover samples were prepared as follows. Bromophenol blue powder and pseudo-boehmite powder (specific surface area: 340 m 2 / g) and sodium thiosulfate pentahydrate powder were mixed using a crushing machine (manufactured by Ishikawa Works Co., Ltd., model 18) while adding water to obtain a kneaded cake (cake). The kneaded cake was made into a granular shaped body with a diameter of about 2 mm and a length of about 6 mm using a plunger extruder. The obtained molded body was dried overnight in an electric dryer kept at 110° C., and then placed in a desiccator for more than 1 hour, thereby cooling down to room temperature to obtain a remover sample of Example 1. The obtained samples were subjected to a color tone evaluation test. The color tone of the remover changed from blue to yellow before and after chlorine treatment.

Embodiment 2

[0162] Using the same method and conditions as in Example 1, bromothymol blue is 0.01% by weight, pseudo-boehmite is 81.99% by weight, and sodium thiosulfate pentahydrate is the remover of Example 2 of 18.00% by weight. Sample (tap density 0.85 g / ml). The obtained samples were evaluated for chlorine removal at 25°C. After the inflow of chlorine gas started, discoloration was observed gradually from near the inlet, and the discoloration range increased over time. Sulfurous acid gas was first detected after 150 minutes of chlorine gas aeration, at the same time the range of discoloration reached the outlet. Then, hydrogen chloride gas was detected after 240 minutes. If the earliest gas breakthrough time is defined as the remover capacity, the remover capacity is 14Lkg -1 . In addition, a color tone evaluation test was performed on the prepared samples. Before and after the color tone evaluation test, the color tone of the remover changed from blue to red. The reason why th...

Embodiment 3

[0164] Using the same method and conditions as in Example 1, the remover sample of Example 3 was prepared with 0.01% by weight of phenolphthalein, 81.99% by weight of pseudoboehmite, and 18.00% by weight of sodium thiosulfate pentahydrate. The obtained samples were subjected to a color tone evaluation test. Before and after the color tone evaluation test, the color tone of the remover changed from red to white.

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Abstract

The invention provides a halogen gas removing agent and a manufacturing method thereof. The halogen gas removing agent for removing halogen gas from a gas flow, which reduces the risk of leakage of the halogen gas exhausted from a semiconductor production process by treating the gas flow with the removing agent and a process for producing the removing agent. Also provided are an apparatus for removing the halogen gas using the removing agent, and a method for monitoring the state of consumption of the halogen gas. The halogen gas removing agent includes an inorganic compound base material, a sulfur-containing reducing compound and a color indicator, preferably using a pseudoboehmite as the base material, adding a pH indicator having a transition range in a pH range of 3 to 8 as the color indicator, and adding a basic metal compound such as zinc oxide. Thus, the halogen gas removing agent which is high in halogen gas treatment capacity and capable of monitoring the consumption state ofthe halogen gas removing agent can be obtained.

Description

technical field [0001] The present invention relates to a halogen gas remover capable of efficiently decomposing and removing halogen-based gases, especially halogen-based waste gases used in etching gases or cleaning agents in manufacturing processes such as semiconductors, which enables easy utilization of , and a reliable method to monitor the consumption state of the remover, thereby predicting the remaining life of the remover and reducing the risk of toxic gas leakage; in particular to a halogen gas remover and its manufacturing method, using the halogen A halogen gas removal device for a gas remover, a method for monitoring the consumption state of a halogen gas remover, and a method for removing halogen gas. Background technique [0002] F in the halogen gas 2 , Cl 2 、Br 2 , ClF 3 , BrF 3 , BrF 5 , broadly including SiF 4 、BCl 3 A variety of halogenated non-metallic gases. As one of the removal methods of these halogen-based gases, a method of physically ads...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B01D53/68G01N21/78
CPCB01D53/68G01N21/783B01D2251/20B01D2251/602B01D2251/604B01D2251/606G01N33/0052B01D53/685B01D2255/20792B01D2253/104B01D2257/202B01J20/08B01J20/043B01J20/0244B01J20/045G01N31/22G01J3/46B01D2253/1124B01D2253/1126B01D2258/0216B01D53/30B01D2257/20B01D2251/608B01D53/73
Inventor 砂田健一朗中嶋直仁金贤中
Owner CLARIANT CATALYSTS JAPAN
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