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Planet rotating device and coating equipment capable of achieving large-batch production

A rotating device and planetary technology, applied in sputtering plating, ion implantation plating, gaseous chemical plating, etc., can solve the problems of deviation of film thickness uniformity, low coating efficiency, poor uniformity, etc., to facilitate later maintenance, Improve coating efficiency and compact structure

Active Publication Date: 2020-02-28
INST OF OPTICS & ELECTRONICS - CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] The purpose of the present invention is to solve the problems of low coating efficiency, non-central symmetry and poor uniformity of the film thickness in the coating of small-diameter spherical optical elements in the existing high-precision imaging optical system, and to provide a kind of enhancement film Layer uniformity, a planetary rotation device that improves the symmetry of the film layer, and can effectively improve the coating efficiency

Method used

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  • Planet rotating device and coating equipment capable of achieving large-batch production
  • Planet rotating device and coating equipment capable of achieving large-batch production
  • Planet rotating device and coating equipment capable of achieving large-batch production

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Embodiment 1

[0044] see figure 1 , figure 2 , the present embodiment provides a planetary rotation device that can enhance the uniformity of the surface film thickness of the spherical element, including a plurality of workpiece suspension plates 301 and the first transmission mechanism 101, and each workpiece suspension plate 301 is connected to the first transmission mechanism respectively. 101 connected, the first transmission mechanism 101 is used to drive the synchronous rotation of each workpiece suspension pan 301; in this planetary rotation device, the number of workpiece suspension pans 301 can be determined according to actual needs, and in actual assembly, the first transmission mechanism 101 is directly or indirectly fixed on the planetary turntable 401 in the existing coating equipment, and the first transmission mechanism 101 is driven to revolve by the planetary turntable 401, and the first transmission mechanism 101 is provided with several workpiece hanging plates 301, ea...

Embodiment 2

[0055] The main difference between this embodiment 2 and the above-mentioned embodiment 1 is that the planetary rotation device provided by this embodiment also includes a second transmission mechanism and a third transmission mechanism 601, and the second transmission mechanism includes a planetary turntable 401 and a gear transmission mechanism; The planetary turntable 401 of the second transmission mechanism rotates under the drive of the motor through the third transmission mechanism 601; the second transmission mechanism is respectively connected with the first transmission mechanism 101 described in Embodiment 1, and the second transmission mechanism is connected through the main transmission The shaft 102 drives the first transmission mechanisms 101 to rotate and / or revolve synchronously; not only can the workpiece suspension plates 301 in the planetary rotating device rotate and revolve, which is beneficial to improve the uniformity of the film layer, but also greatly in...

Embodiment 3

[0062] This embodiment provides a coating device capable of mass production, including the planetary rotation device described in Embodiment 1 or Embodiment 2.

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Abstract

The invention relates to a planet rotating device and coating equipment capable of achieving large-batch production. The planet rotating device comprises multiple workpiece hanging scaffolds and a first transmission mechanism. The workpiece hanging scaffolds is connected with the first transmission mechanism. The first transmission mechanism is used for driving the workpiece hanging scaffolds to achieve synchronous autorotation. According to the planet rotating device, the structure is compact, the workpiece hanging scaffolds achieve synchronous autorotation and revolution, and therefore uniformity of film layers on the surface of a spherical optic element is effectively optimized, and films on the surface of the coated spherical optic element are distributed in central symmetry; and the multiple workpiece hanging scaffolds can coat multiple spherical optic element mirror billets at the same time, and coating efficiency can be effectively improved. The planet rotating device and the coating equipment are especially suitable for the coating field for large batches of small-caliber spherical elements and distribution of high film thickness uniformity.

Description

technical field [0001] The invention relates to the technical field of coating, in particular to a planetary rotation device capable of enhancing the uniformity of film thickness on the surface of a spherical element and a coating device capable of realizing the production of large quantities of spherical optical elements. Background technique [0002] Spherical optical components are the core components of precision optical imaging systems such as cameras and lithography machines. Coating anti-reflection coatings on the surface of spherical optical elements is a key technology to ensure the imaging quality of precision imaging systems. Optical thin films are composed of materials (film layers) with high and low refractive indices deposited onto optical substrates in a specific order, and their spectral characteristics are related to the thickness of each film layer. Thin film thickness uniformity refers to the situation in which the film thickness varies with the position ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/50C23C16/458
CPCC23C14/505C23C16/4581
Inventor 柳存定黎明郭丽娜
Owner INST OF OPTICS & ELECTRONICS - CHINESE ACAD OF SCI
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