Plane three-degree-of-freedom precision positioning platform, and using method and control method thereof

Abstract

The invention provides a plane three-degree-of-freedom precision positioning platform, and a using method and a control method thereof. The positioning platform comprises a base, a movable platform and a transmission mechanism positioned on the base, and four voice coil motors; the transmission mechanism comprises four flexible branched chains, and each flexible branched chain comprises three flexible P units and one flexible R unit, through the structural design of the flexible P units, the connection design of each flexible P unit, the structural design of the flexible R units and the connection design with the flexible P units, translation along the X axis and the Y axis and rotation around the Z axis are realized. Compared with the prior art, the plane three-degree-of-freedom precisionpositioning platform solves the contradiction between the motion range, the motion rigidity and the motion precision of the transmission mechanism, and the positioning platform has large motion range, high output rigidity and high motion precision; meanwhile, the problem of insufficient thrust of the voice coil motors can be effectively solved, and the requirement on the driving force peak valueof the voice coil motors is reduced due to the addition of redundant driving branch chains.

Description

technical field [0001] The invention relates to the technical field of precision positioning, in particular to a plane three-degree-of-freedom precision positioning platform, its use method and control method. Background technique [0002] The transmission mechanism has always been the basis for the realization of functions of mechanical equipment, and the precision transmission mechanism is one of the key technologies that need urgent development in the field of modern precision engineering. [0003] Traditional rigid mechanisms rely on kinematic pairs to transmit force and displacement. Due to the inevitable gaps, friction and wear between components, it is difficult to achieve motion accuracy of microns or less. The compliant parallel mechanism transmits force and displacement through the elastic deformation of the structure, completely eliminating the lost motion and mechanical friction in the transmission process of the kinematic pair, so that it can obtain extremely hi...

AI Technical Summary

Problems solved by technology

The positioning platform has a high output stiffness. In order to achieve centimeter-level displacement, a voice coil motor with a large driving force needs to be selected, which not only increases the volume of the mechanism, but also causes serious heating of the mechanism when it works for a long time.

At the same time, the mechanism has only two translational degrees of freedom and cannot adjust the rotation of the end platform

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