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Plane three-degree-of-freedom precision positioning platform, and using method and control method thereof

A precision positioning and degree of freedom technology, applied in the direction of workbench, manufacturing tools, machine table/support, etc., can solve the problems of increasing the volume of the mechanism, the inability to adjust the end platform, and the heating of the mechanism, so as to achieve a large range of motion and reduce parasitic motion , Improve the effect of output stiffness

Active Publication Date: 2020-03-24
NINGBO INST OF MATERIALS TECH & ENG CHINESE ACADEMY OF SCI
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  • Abstract
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  • Claims
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Problems solved by technology

The positioning platform has a high output stiffness. In order to achieve centimeter-level displacement, a voice coil motor with a large driving force needs to be selected, which not only increases the volume of the mechanism, but also causes serious heating of the mechanism when it works for a long time.
At the same time, the mechanism has only two translational degrees of freedom and cannot adjust the rotation of the end platform

Method used

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  • Plane three-degree-of-freedom precision positioning platform, and using method and control method thereof
  • Plane three-degree-of-freedom precision positioning platform, and using method and control method thereof
  • Plane three-degree-of-freedom precision positioning platform, and using method and control method thereof

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Embodiment Construction

[0042] The present invention will be further described in detail below in conjunction with the embodiments and the accompanying drawings. It should be noted that the following embodiments are intended to facilitate understanding of the present invention, but do not limit it in any way.

[0043] Such as figure 1 As shown, the precision positioning platform includes a base 12, a moving platform 14 located on the base 12, a transmission mechanism 1, and four voice coil motors, namely the first voice coil motor 4, the second voice coil motor 7, and the third voice coil The motor 10 and the fourth voice coil motor 11.

[0044] Such as figure 2 As shown, the transmission mechanism 1 includes four identical flexible branch chains, namely the first flexible branch chain 13 , the second flexible branch chain 25 , the third flexible branch chain 26 and the fourth flexible branch chain 27 . In addition, the four flexible branch chains are center-symmetrically distributed with the movi...

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Abstract

The invention provides a plane three-degree-of-freedom precision positioning platform, and a using method and a control method thereof. The positioning platform comprises a base, a movable platform and a transmission mechanism positioned on the base, and four voice coil motors; the transmission mechanism comprises four flexible branched chains, and each flexible branched chain comprises three flexible P units and one flexible R unit, through the structural design of the flexible P units, the connection design of each flexible P unit, the structural design of the flexible R units and the connection design with the flexible P units, translation along the X axis and the Y axis and rotation around the Z axis are realized. Compared with the prior art, the plane three-degree-of-freedom precisionpositioning platform solves the contradiction between the motion range, the motion rigidity and the motion precision of the transmission mechanism, and the positioning platform has large motion range, high output rigidity and high motion precision; meanwhile, the problem of insufficient thrust of the voice coil motors can be effectively solved, and the requirement on the driving force peak valueof the voice coil motors is reduced due to the addition of redundant driving branch chains.

Description

technical field [0001] The invention relates to the technical field of precision positioning, in particular to a plane three-degree-of-freedom precision positioning platform, its use method and control method. Background technique [0002] The transmission mechanism has always been the basis for the realization of functions of mechanical equipment, and the precision transmission mechanism is one of the key technologies that need urgent development in the field of modern precision engineering. [0003] Traditional rigid mechanisms rely on kinematic pairs to transmit force and displacement. Due to the inevitable gaps, friction and wear between components, it is difficult to achieve motion accuracy of microns or less. The compliant parallel mechanism transmits force and displacement through the elastic deformation of the structure, completely eliminating the lost motion and mechanical friction in the transmission process of the kinematic pair, so that it can obtain extremely hi...

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): F16C11/12F16M11/04G12B5/00B25H1/00
CPCF16C11/12F16M11/04G12B5/00B25H1/00
Inventor 杨淼杨桂林张驰余宏涛黄晓路桑娜
Owner NINGBO INST OF MATERIALS TECH & ENG CHINESE ACADEMY OF SCI
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