Micro-nano optical fiber Fabry-Perot sensor for high-speed dynamic temperature measurement and manufacturing method
A technology of micro-nano optical fiber and dynamic temperature measurement, which is applied in the direction of instruments, thermometers, heat measurement, etc., to achieve the effect of increasing conductivity, avoiding the influence of evanescent waves, and increasing reliability
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Embodiment 1
[0037] This implementation discloses a high-speed dynamic temperature measurement micro-nano optical fiber method-Per sensor, see figure 1 , including a bracket 1 and a micro-nano optical fiber 4 .
[0038] The micro-nano fiber method-Pertin cavity 2 is engraved in the micro-nano fiber 4 . The micro-nano fiber method-Percavity 2 is carved by ultraviolet mask photolithography. The outer wall of the micro-nano optical fiber 4 is coated with a metal layer 3 . In this embodiment, the metal layer 3 is a copper layer.
[0039] The bracket 1 is a rectangular cylinder made of stainless steel, and a through groove 101 is processed in the middle of the rectangular cylinder. The four side walls of the bracket 1 are sequentially recorded as a first side wall, a second side wall, a third side wall and a fourth side wall. A hole communicating with the through groove 101 is processed on the third side wall, and the right end fixing area 5 is fixed in the hole. Zone 5 corresponds to the ...
Embodiment 2
[0044] This embodiment provides a relatively basic implementation method, a micro-nano optical fiber method-Per sensor for high-speed dynamic temperature measurement, see figure 1 , including a bracket 1 and a micro-nano optical fiber 4 .
[0045] The micro-nano fiber method-Pertin cavity 2 is engraved in the micro-nano fiber 4 . The outer wall of the micro-nano optical fiber 4 is coated with a metal layer 3 . In this embodiment, the metal layer 3 is a copper layer.
[0046] The bracket 1 is a cylinder, and the side wall of the cylinder is processed with a through groove 101 running through the entire side wall. The two bottom surfaces of the cylinder are processed with holes communicating with the through groove 101, and the right-end fixing area 5 and the left-end fixing area 6 are respectively fixed in the holes on the two bottom surfaces.
[0047] The micro-nano fiber 4 with the metal layer 3 is installed in the right-end fixing area 5 and the left-end fixing area 6 . Th...
Embodiment 3
[0050] The main structure of this embodiment is the same as that of Embodiment 2, and further, the micro-nano fiber method-Pertin cavity 2 is engraved by femtosecond laser writing method.
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