Clamping and rotating device for physical deposition of coating on surface of thin bar
A technology of surface physics and rotating devices, applied in metal material coating process, coating, ion implantation plating, etc., can solve problems such as low processing quality, low processing efficiency, complex structure, etc., to reduce implementation costs and improve consistency The effect of sex and simple structure
Pending Publication Date: 2020-04-07
PEKING UNIV SHENZHEN GRADUATE SCHOOL
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Problems solved by technology
[0006] In order to overcome the deficiencies of the prior art, the present invention provides a clamping and rotating device for physically depositing coatings on the surface of thin rods, which solves the complex structure, high implementation cost, low processing efficiency, thin rod surface coating and other problems existing in the prior art. Technical defects such as poor layer consistency and low processing quality
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Embodiment 1
[0045] A TiN coating with a thickness of 8 μm is deposited by magnetron sputtering on the surface of a thin bar 9 made of pure titanium for a medical device. The thin bar 9 is made of TA4 pure titanium and has a diameter of 5 mm. First of all, install the assembled thin bar 9 with the physical deposition coating on the surface into the vacuum chamber of the magnetron sputtering equipment with a clamping and rotating device, and fix the cleaned TA4 pure titanium thin bar on the passive rotating shaft (the first between the passive rotating shaft 31 and the second passive rotating shaft 32 ), and fasten the thin rod locking screw 92 . Turn on the power of the main shaft to start the whole device, adjust the speed of the main shaft 11 to make the rotation speed and revolution speed of the thin bar 9 so that it can be handled within a reasonable range, and turn off the power of the main shaft. Then, close the vacuum chamber door and draw a vacuum to make the background vacuum high...
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The invention discloses a clamping and rotating device for physical deposition of a coating on the surface of a thin bar. The device comprises a base and a main rotating shaft, a bearing frame is fixedly arranged on the main rotating shaft, a driving rotating shaft capable of rotating in the radial direction is arranged on the bearing frame, a first driven rotating shaft capable of radially rotating is arranged at one end of the bearing frame, a second driven rotating shaft capable of radially rotating is arranged at the other end of the bearing frame, a first gear transmission assembly is arranged between the outer end of the driving rotating shaft and the base, a second gear transmission assembly is arranged between the driving rotary shaft and the first driven rotary shaft, a third geartransmission assembly is arranged between the driving rotary shaft and the second driven rotary shaft, and the first driven rotary shaft and the second driven rotary shaft are used for clamping the two ends of a thin bar required to perform surface coating physical deposition machining. The clamping and rotating device for physical deposition of the coating on the surface of the thin bar has theadvantages of being simple in structure, stable and reliable in performance, low in implementation cost, easy to implement, good in machining quality, high in consistency of the coating on the surfaceof the thin bar and the like.
Description
technical field [0001] The present invention relates to an auxiliary device used in the field of surface modification, in particular to a clamping and rotating device used for physical deposition coating on the surface of thin rods. Background technique [0002] Physical vapor deposition is a low-voltage, high-current arc discharge technology under vacuum conditions. Gas discharge is used to evaporate the target material and generate electricity for both substances and gases. With the acceleration of the battery, the evaporated substances or reaction products are deposited. Surface modification machining process on the workpiece surface. Physical vapor deposition technology mainly includes vacuum evaporation, sputtering and ion plating. Through physical vapor deposition, some properties of the workpiece surface can be effectively improved, including strength, hardness, wear resistance, corrosion resistance, Biocompatibility, etc. [0003] Physical vapor deposition technolo...
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IPC IPC(8): C23C14/50
CPCC23C14/505
Inventor 盛立远
Owner PEKING UNIV SHENZHEN GRADUATE SCHOOL