Contact laser interference displacement sensor and measuring method

A technology of displacement sensor and laser interference, which is applied in the direction of measuring devices, instruments, optical devices, etc., can solve the problems such as the inability to directly realize the measurement of large-size and high-precision parts, and achieve simple structure, extended range and precision, and convenient installation. Effect

Pending Publication Date: 2020-04-17
XIAN TECHNOLOGICAL UNIV
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Problems solved by technology

[0004] The purpose of the present invention is to provide a contact laser interference displacement sensor and measurement method, which overcomes the problem that the measuremen

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  • Contact laser interference displacement sensor and measuring method
  • Contact laser interference displacement sensor and measuring method
  • Contact laser interference displacement sensor and measuring method

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Embodiment Construction

[0019] see figure 1 , the present invention is a contact laser interference displacement sensor, including a measuring sub 1, a mirror 2, a front limit block 3, a measuring rod 4, a rolling pair 5, a rear limit block 6, a laser beam 7, and a sensor sleeve 8 , a collimator 9, an optical fiber 10 and a frequency-modulated continuous wave interference signal processor. The front end of the measuring rod 4 is provided with a probe 1 and a reflector 2 in turn. The probe 1 and the measuring rod 4 are connected by threads at the front end. The mirror 2 and the measuring rod 4 are connected by thread or bonded. The measuring rod 4 is arranged on the sensor bushing 8 through the rolling pair 5 fixed at the front end of the sensor bushing 8, the measuring rod 4 is a hollow structure, the measuring rod 4 can move along the axial direction of the sensor bushing 8, and the The cross section of the rod 4 and the sensor bushing 8 is circular. The front limit block 5 and the rear limit blo...

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Abstract

The invention relates to a contact laser interference displacement sensor and a measuring method, which overcome the problem that large-size and high-precision parts cannot be directly measured in theprior art, and realize the precision measurement of the large-size and high-precision parts. The contact laser interference displacement sensor comprises a sensor shaft sleeve, a hollow measuring rodis arranged on the sensor shaft sleeve through a rolling pair fixed at the front end of the sensor shaft sleeve, a measuring body and a reflector are sequentially arranged at the front end of the measuring rod, a collimator is arranged at the rear end of the sensor shaft sleeve and connected with an optical fiber, and the optical fiber is connected with a frequency modulation continuous wave interference signal processor. The front end and the rear end of the measuring rod are provided with a front limiting block and a rear limiting block respectively, and the front limiting block and the rear limiting block are in threaded connection with the measuring rod.

Description

Technical field: [0001] The invention relates to a laser displacement sensor, in particular to a contact type laser interference displacement sensor and a measuring method. Background technique: [0002] In recent years, in the fields of aerospace, automobile and shipbuilding, etc., the requirements for large-scale, high-precision geometric measurement of parts have become higher and higher, especially the demand for real-time and large-scale production site measurement has become increasingly prominent. As a displacement measurement media, the development of displacement sensor technology is also changing with each passing day. The current factory production workshop uses more displacement sensors, including inductance sensors (LVDT), pneumatic sensors, grating displacement sensors, Hall displacement sensors, laser triangulation displacement sensors, etc. Inductive displacement sensors, in particular, are widely used in the mechanical equipment industry due to their charac...

Claims

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Application Information

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IPC IPC(8): G01B11/02G01B9/02
CPCG01B9/02003G01B11/02
Inventor 孙彬郑刚张雄星白浪
Owner XIAN TECHNOLOGICAL UNIV
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