Detector for three-dimensional imaging and manufacturing method thereof

Abstract

The invention provides a detector for three-dimensional imaging and a manufacturing method of the detector, and solves the problems that an existing position-sensitive anode detector easily leaks air,so that a device cannot be used, and the subsequent electronic processing difficulty is increased. The detector comprises a tube shell body, a micro-channel plate assembly, a position-sensitive anodeassembly and an input window with a photocathode, wherein the position-sensitive anode assembly comprises an upper-layer anode receiving panel, a lower-layer anode receiving panel and a lead electrode; the upper-layer anode receiving panel and the lower-layer anode receiving panel are arranged in parallel at an interval; the upper-layer anode receiving panel comprises an upper-layer insulating substrate and an upper-layer metal electrode, and an upper-layer insulating substrate area corresponding to a microstrip line part in an upper-layer metal electrode collecting area is hollow; wherein the lower-layer anode receiving panel comprises a lower-layer insulating substrate and a lower-layer metal electrode, a microstrip line structure of the lower-layer metal electrode and a microstrip linestructure of the upper-layer metal electrode are vertically crossed on a different-layer plane, and the lead electrode comprises two upper lead electrodes and two lower lead electrodes.

Description

technical field [0001] The invention belongs to weak and extremely weak light detection technology, and specifically relates to a detector that can be used for three-dimensional imaging and a manufacturing method thereof, and has important application value in applications such as bioluminescence, space astronomy, and laser radar. Background technique [0002] The photon counting imaging detector based on microchannel plate and position-sensitive anode readout has the advantages of high signal-to-noise ratio, good drift resistance, good time stability, etc., and has good time and space resolution and high detection sensitivity. Photon counting imaging detectors mainly use pulse discrimination technology and digital counting technology to identify and extract extremely weak signals, and have been widely used in astronomy, high-energy physics, biomedicine and other fields. [0003] The position-sensitive anode detector uses a position-sensitive anode to collect the electron c...

AI Technical Summary

Problems solved by technology

[0006] In order to solve the problem that existing position-sensitive anode detectors have a large number of split anodes and lead wires, which are prone to air leakage and cause the device to be unusable; in addition, the use of resistive film sensing has lost some signals, and the output signal is too small to increase the difficulty of subsequent electronic processing. Problem, the present invention provides a detector for three-dimensional imaging and its manufacturing method

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