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Target material corrosive agent and application method thereof

An application method and technology of etchant, which is applied in the field of heat treatment, can solve the problems of inability to clearly display the metallographic structure of stainless steel target grains, and achieve the effect of strong corrosion performance

Inactive Publication Date: 2020-04-28
KONFOONG MATERIALS INTERNATIONAL CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] The problem solved by the present invention is: the prior art cannot clearly display the grain metallographic structure inside the stainless steel target

Method used

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  • Target material corrosive agent and application method thereof
  • Target material corrosive agent and application method thereof
  • Target material corrosive agent and application method thereof

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Embodiment Construction

[0025] It can be seen from the background technology that in judging the performance of the stainless steel target, it is necessary to judge the sputtering performance of the stainless steel target according to the internal structure of the stainless steel target. For example, the size of the internal grains of stainless steel has a decisive influence on the mechanical properties and corrosion resistance of stainless steel at room temperature and high temperature. Metallographic observation is the most direct and effective method to study the internal structure of stainless steel targets, so it is necessary to analyze and study the metallographic phase of the internal grains of stainless steel targets. Before conducting grain gold analysis and research, it is necessary to clearly display the grain boundaries inside the stainless steel target.

[0026] In the prior art, nitric acid and alcohol solutions are often used as target etchant to corrode stainless steel targets. Howeve...

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Abstract

Disclosed are a target material corrosive agent and an application method thereof. The target material corrosive agent comprises sulfuric acid, nitric acid, hydrofluoric acid and hydrochloric acid, wherein the mass percentage of the sulfuric acid is 20-23%, the mass percentage of the nitric acid is 15-18%, the mass percentage of the hydrofluoric acid is 21-24%, and the mass percentage of the hydrochloric acid is 33-40%. A stainless steel sample is also provided, and the target material corrosive agent is used for corroding the sample, and the corroded sample is cleaned and dried in a blowing mode. Metallographic observation is carried out on the stainless steel sample by using the target material corrosive agent, the target material corrosive agent is used for corroding the stainless steelsample, the grain boundary of the sample can be completely displayed, and the grain size error caused by incomplete displaying of the grain boundary of the sample is avoided. The completely corrodedsample is cleaned and dried in a blowing mode, impurities on the surface of the sample are reduced, and the observation of the grain boundary of the interior of the sample is more accurate.

Description

technical field [0001] The invention relates to the technical field of heat treatment, in particular to a target etchant and an application method thereof. Background technique [0002] With the rapid development of the semiconductor industry, the number of stainless steel targets that need to be used in the packaging industry has increased sharply, and the performance requirements for stainless steel targets have also continued to increase. The internal structure of stainless steel targets and its hardness, strength, and ductility. Direct and close relationship, so the sputtering performance of the target is usually judged according to the internal structure of the stainless steel target. [0003] Metallographic observation is the most direct and effective method to study the internal structure of stainless steel targets, so it is necessary to analyze and study the metallographic phase of the internal grains of stainless steel targets. The existing method uses nitric acid ...

Claims

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Application Information

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IPC IPC(8): C23F1/28G01N1/32
CPCC23F1/28G01N1/32
Inventor 姚力军潘杰王学泽黄东长
Owner KONFOONG MATERIALS INTERNATIONAL CO LTD
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