Preparation method of film for regulating and controlling electrocaloric performance through substrate

A technology of substrate and thin film is applied in the field of preparation of thin films for regulating electric card performance through substrates, and achieves the effects of high purity, convenient and quick preparation technology, and high electric field breakdown strength
CN111128682APending Publication Date: 2020-05-08GUANGXI UNIV
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Patent Information

Authority / Receiving Office
CN · China
Current Assignee / Owner
GUANGXI UNIV
Publication Date
2020-05-08

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Abstract

The invention relates to the technical field of ferroelectric film preparation, in particular to a preparation method of a film for regulating and controlling electrocaloric performance through a substrate, and belongs to the technical field of chemical engineering. The method comprises the following steps: spin-coating a LaNiO3 precursor solution on the substrate to prepare a first wet film, andperforming drying, pyrolyzing and annealing to prepare a layer of LaNiO3 film; repeating the previous steps to prepare a composite substrate with multiple layers of LaNiO3 / substrates; spin-coating thePb0.78Ba0.2La0.02ZrO3 precursor solution on a composite substrate to prepare a second wet film, and performing drying, pyrolyzing and annealing the second wet film to prepare a layer of Pb0.78Ba0.2La0.02ZrO3 film; and repeating the previous steps to prepare the multi-layer Pb0.78Ba0.2La0.02ZrO3 thin film. The invention further discloses a preparation method of the Pb0.78Ba0.2La0.02ZrO3 thin film.According to the method, the film with the advantages of high purity, good compactness, small average grain size, high electric field breakdown strength, high electrocaloric effect and the like can be obtained.
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Description

Technical field

[0001] The invention relates to the technical field of ferroelectric thin film preparation, in particular to a method for preparing a thin film for regulating and controlling electric card performance through a substrate, and belongs to the technical field of chemical engineering. Background technique

[0002] With the development of electronics, information and control technology towards miniaturization and high integration, and the demand for rapid refrigeration in the high-tech field, the development of high-efficiency solid-state refrigeration technology has been put on the agenda. As a branch of piezoelectric materials, ferroelectric materials are excellent candidates due to their electrical characteristics under an applied electric field. At present, the research on the electric card effect of ferroelectric materials mainly focuses on the research field of ceramics and thin films based on Si-based semiconductors. For example, the research on Pb x Sr 1-x TiO ...

Claims

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