A mems gyroscope

A gyroscope and spiral technology, which is applied in the field of MEMS gyroscopes, can solve the problems of low quality factor and small space layout of disc-shaped gyroscopes, and achieve the effects of facilitating micro-nano processing, degeneracy of mode shapes, and reduction of width

Active Publication Date: 2022-03-04
AAC TECH NANJING
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, limited by the small space layout, the quality factor of the disc-shaped gyroscope is low, so there are few disc-shaped gyroscopes that achieve high performance.

Method used

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  • A mems gyroscope
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  • A mems gyroscope

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0040] Implement 1, such as Figure 2-4 Said:

[0041] A MEMS gyroscope in this embodiment includes a resonator and 16 external electrodes 3, and the external electrodes 3 are distributed in a circular array on the periphery of the resonator 6, and the resonator is an axisymmetric disk-shaped network structure, so The harmonic oscillator includes an anchor point structure 1 located in the center of the harmonic oscillator and a helix structure, the helix structure is fixedly connected to the anchor point, the helix structure is composed of 16 helix units in a circular array according to the starting point, each helix A line unit corresponds to one external electrode 3 .

[0042] refer to figure 2, the helical structure is a helical network structure 2 formed by interweaving a plurality of helical unit circular arrays, the first helixes 21 of two adjacent helical units are parallel and equal in length, and the helical network structure also includes A parallelogram hole com...

Embodiment 2

[0046] Implement 2, such as figure 2 and Figure 5 Said:

[0047] The structure of this embodiment is substantially the same as that of Embodiment 1, except that: a spoke structure 4 is arranged in the hole formed by the intersection of the helix structure 2, and the spoke structure 4 is located at the acute angle part of the hole and forms the acute angle. The adjacent two sides of each are connected; specifically, the spoke structure 4 is located at the acute angles on the left and right sides of the parallelogram hole, and the spoke structure 4 is straight beam-shaped. After adding the spoke structure 4, the hole structure of the parallelogram is both Obtuse-angled hexagons, other deformation improvements made to the spoke structure 4 to transform holes with acute-angled structures into holes with obtuse-angled structures all belong to the protection scope of the present invention. The spoke structure 4 can reduce the difficulty of micro-nano processing, weaken the influ...

Embodiment 3

[0048] Implement 3, such as Figure 6-9 Said:

[0049] The helix structure proposed in this embodiment is a honeycomb helix structure 5, and the honeycomb helix structure 5 is formed by deformation treatment of the helix network structure 2, and the deformation treatment includes using a connecting beam 52 to connect the helix along the radial direction of the anchor point structure. The nodes of the network structure 2 and the helical lines intersecting between the adjacent connecting beams 52 in the circumferential direction are removed, thereby forming a honeycomb-shaped subunit surrounded by the left and right connecting beams 52 and the upper and lower helical line units, and the honeycomb-shaped subunits include helical lines And the connecting beam 52 extending radially along the anchor point structure, the hole is formed by connecting the connecting beam 52 and the helix end-to-end to form a hexagonal structure, the connecting beam 52 is a straight beam, the There are...

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Abstract

The invention discloses a MEMS gyroscope, which relates to a gyroscope; it includes a harmonic oscillator and a plurality of external electrodes, the external electrodes are distributed in a circular array on the periphery of the harmonic oscillator, and the harmonic oscillator is an axisymmetric disk-shaped net structure, the harmonic oscillator includes an anchor point structure and a helix structure located at the center of the harmonic oscillator, the helix structure is fixedly connected to the anchor point structure, and the helix structure is composed of a plurality of helix units according to the anchor point structure The circular array is interweaved into a network; the present invention is based on the advantages of the disc-type gyroscope, and the spiral structure is formed by the circular array of the spiral unit according to the starting point, with built-in anchor points, simplified spiral line segments and other means to reduce the difficulty of the process and facilitate micro Nano-processing, while reducing the width h of the deformation of the resonator, thereby increasing the Q TED ; The present invention utilizes the symmetric feature of the helical structure to realize that the gyroscope drive mode and detection mode have a large quality factor, the vibration mode is degenerate, and conforms to the Coriolis effect.

Description

【Technical field】 [0001] The invention relates to a gyroscope, in particular to a MEMS gyroscope. 【Background technique】 [0002] MEMS gyroscopes are widely used in the consumer electronics market due to their small size, low power consumption and easy processing. In recent years, with the gradual improvement of the accuracy of MEMS gyroscopes, MEMS resonant gyroscopes are also used in automotive autonomous driving, etc. navigation field. [0003] Gyroscope quality factor is a key parameter to characterize the energy loss of gyroscope when it works in resonance, and the quality factor is one of the indirect evaluation indicators of gyroscope performance. Common energy loss mechanisms include air damping losses, surface losses, anchor point losses, electronics damping, and thermoelastic damping losses. Since the gyroscope is packaged in high vacuum, thermoelastic damping can be considered as the main source of energy loss during work, and the thermoelastic quality factor Q ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01C19/56G01C19/42G01C19/16
CPCG01C19/56G01C19/42G01C19/16
Inventor 马昭占瞻李杨张睿刘雨微谭秋喻黎家健
Owner AAC TECH NANJING
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