Ultrasonic cavitation-assisted ultrasonic magnetic polishing method for microstructure molds

Abstract

The invention discloses a device and method for dual-ultrasonic-assisted magnetic polishing of microstructure molds. By separately setting an ultrasonic vibration device that generates ultrasonic cavitation effects, it can ensure sufficient ultrasonic cavitation in the polishing area and increase the polishing pressure. At the same time, Since the microstructure mold is completely immersed in the polishing solution, the nano-SiO in the polishing solution 2 The particles also have a certain polishing effect on the mold material, which is beneficial to the removal of the mold material and improves the quality of the polished surface. In addition, unlike in the prior art, the ultrasonic spindle of the machine tool is perpendicular to the surface of the workpiece to be polished, the ultrasonic spindle of the machine tool in the present invention is set parallel to the surface to be polished of the microstructure mold, and the polishing process is performed through the circumferential surface of the annular permanent magnet, and the entire polishing The tangential line speed of the processing area is consistent from the center to the edge, thus increasing the polishing processing speed and improving the processing efficiency.

Description

technical field [0001] The invention relates to a device and method for double-ultrasonic-assisted magnetic polishing of a microstructure mold, belonging to the field of precision manufacturing, and specifically relates to a microstructure mold precision polishing process method and a realization device. Background technique [0002] Microstructured optical components are widely used in the fields of national defense and military, mechatronics, optics and optoelectronics, such as the microlens array backlight module in the liquid crystal display screen of mobile phones, computers and other electronic equipment, which can make the display screen obtain bright and uniform Display effect; optical fiber connectors and micro sensors in the field of mechanical electronics, shadowless lamps in the field of biomedicine, large-aperture zone plates in military satellite imaging systems, and guidance systems in missiles. At present, people's demand for microstructured optical component...

AI Technical Summary

Problems solved by technology

However, since most of the microstructure molds used for molding optical components are hard alloys, the material properties of which are completely different from those of the aforementioned hard and brittle materials, the traditional ultrasonic magnetorheological composite polishing method for grinding and polishing the microstructure molds cannot achieve The ideal polishing effect cannot meet the high-quality processing needs of microstructured mold surfaces

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