Magnetoresistance micro-area morphology sensor

Abstract

The embodiment of the invention discloses a magnetoresistance micro-area morphology sensor. The magnetoresistive sensor comprises a silicon substrate, at least one magnetoresistive detection array anda plurality of force conduction structures, the magnetic resistance detection array is arranged on the first surface of the silicon substrate; each magnetic resistance detection array comprises a plurality of detection areas, a plurality of magnetic resistance sensitive elements are arranged in each detection area, the equivalent magnetic moment directions of the magnetic resistance sensitive elements are parallel or perpendicular to the first surface, the force conduction structures are arranged on the sides, away from the silicon substrate, of the magnetic resistance detection arrays, and each force conduction structure covers at least one magnetic resistance sensitive element. The magnetoresistance micro-area morphology sensor has high resolution, high sensitivity and good anti-counterfeiting performance and electrostatic discharge resistance, and is suitable for detection of various measurement environments and various fingerprint qualities.

Description

technical field [0001] Embodiments of the present invention relate to sensor technology, in particular to a magnetoresistive micro-domain topography sensor. Background technique [0002] Micro-area topography sensors, especially fingerprint recognition sensors, have received widespread attention due to their applications in the fields of consumer electronics, industrial control and automobile manufacturing. High-precision micro-area topography sensors can be used in technical fields that require rapid detection and identification of micro-area surface or shallow surface topography (such as fingerprints), such as identification, security, device lock control, automotive control systems, and Material micro-area detection and other technical fields. [0003] In recent years, in the field of micro-area topography sensors, optical, pressure, capacitance and ultrasonic sensors have been widely used. As a traditional micro-area shape sensor, the optical sensor has good electrosta...

AI Technical Summary

Problems solved by technology

As a traditional micro-area shape sensor, the optical sensor has better electrostatic discharge resistance and does not require the object to be detected to be attached to the sensor surface, but it has high requirements for the quality of the micro-area surface and poor anti-counterfeiting ability, which is difficult to detect. Distinguish the difference between the photo and the body of the detected object; the cost of the pressure sensor is low, and it has a high resolution, but the sensitivity is poor, and the protective layer on the surface of the sensor is easy to affect the detection result; Poor performance, and when the ambient temperature deviates from room temperature, signal distortion is likely to occur; ultrasonic sensors have high sensitivity and better durability than capacitive sensors, but they are bulky and costly

[0004] It can be seen that none of the existing sensors in the micro-area topography sensor industry can have high sensitivity, high resolution, high anti-counterfeiting, anti-static and other characteristics at the same time.

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