Rare earth permanent magnetic device with lanthanum and cerium added and manufacturing method thereof
A rare earth permanent magnet and manufacturing method technology, applied in the direction of inductance/transformer/magnet manufacturing, magnetic materials, electrical components, etc., can solve the problems of magnet heat resistance, magnetic influence, limited utilization and so on
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Embodiment 1
[0054] Adopt the vacuum coating equipment among the present invention to coat No. 0 sample, the sputtering device in the vacuum coating equipment presses figure 1 The arrangement of the embodiment in , that is, one ion source and three multi-arc targets, wherein the targets of multi-arc targets 9 and 10 are PrNd alloys, and the target material of multi-arc target 11 is metal Tb. When the equipment is working, the carrying device containing the No. 0 sample is sequentially coated through the ion source sputtering area and the multi-arc target sputtering area. Then the No. 0 sample with coating on the surface was sent to the vacuum heat treatment equipment for grain boundary diffusion heat treatment, and the finished rare earth permanent magnet device was made into No. 1 sample.
Embodiment 2
[0056] Adopt the vacuum coating equipment among the present invention to coat No. 0 sample, the sputtering device in the vacuum coating equipment presses figure 2 The arrangement of the embodiment in , that is, one ion source and three magnetron sputtering targets, wherein the target material of magnetron sputtering targets 20 and 21 is PrNd alloy, and the target material of magnetron sputtering target 22 is metal Tb. When the equipment is working, the carrying device containing the No. 0 sample passes through the sputtering area of the ion source and the sputtering area of the magnetron sputtering target for coating in sequence. Then, the No. 0 sample with coating on the surface was sent to the vacuum heat treatment equipment for grain boundary diffusion heat treatment, and the finished rare earth permanent magnet device was made into No. 2 sample.
Embodiment 3
[0058] Adopt the vacuum coating equipment among the present invention to coat No. 0 sample, the sputtering device in the vacuum coating equipment presses image 3 The arrangement in the embodiment, that is, one multi-arc target and two magnetron sputtering targets, wherein the target material of the multi-arc target 9 is PrNd alloy, and the target material of the magnetron sputtering targets 20 and 21 is metal Tb. When the equipment is working, the carrying device containing the No. 0 sample passes through the multi-arc target sputtering area and the magnetron sputtering target sputtering area for coating in sequence. Then the No. 0 sample with coating on the surface was sent to the vacuum heat treatment equipment for grain boundary diffusion heat treatment, and the finished rare earth permanent magnet device was made into No. 3 sample.
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Abstract
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