High-resolution spectrograph based on etched diffraction grating

Abstract

The invention provides a high-resolution spectrograph based on an etched diffraction grating. The high-resolution spectrograph comprises a substrate, an input waveguide, a free transmission area, a reflection grating and an output waveguide which are integrated on the substrate, the input waveguide is used for receiving an optical signal to be measured and transmitting the optical signal to the free transmission area; the free transmission area transmits the light to be measured emitted from the input waveguide and the light to be measured reflected by the reflection grating; the reflection grating is used for reflecting the optical signal to be measured to the incident end of the output waveguide, so that the reflected light meets the condition of interference elongation at the incident end of the output waveguide; and the output waveguide is a dense array waveguide, the dense array waveguide is formed by circularly arranging a plurality of waveguides with different widths, each waveguide is an output channel, and each output channel outputs light with different wavelengths. Compared with a spectrometer using an equal-width array waveguide as an output waveguide, the spectrographhas the advantages that under the condition of the same spectrometer device size, the number of output channels is larger, the distance between the output channels is smaller, and the spectrometer resolution ratio is higher.

Description

technical field [0001] The invention belongs to the field of optical technology, and in particular relates to a high-resolution spectrometer based on an etched diffraction grating. Background technique [0002] Spectrometers are of great significance in chemical and biological sensing, material analysis, and light source characterization. High-resolution on-chip spectrometers provide low-cost and compact spectral analysis techniques for portable sensing. In recent years, silicon-on-insulator (SOI, Silicon-On-Insulator) integrated platform has attracted much attention due to its advantages of compactness, reliable performance, and high sensitivity, and has become an ideal platform for implementing on-chip spectrometers and on-chip laboratory systems. [0003] In the prior art, the on-chip spectrometer generally adopts the traditional equal-width array waveguide as the output waveguide. The width of each output channel of the output waveguide is the same, and the distance betw...

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Problems solved by technology

[0003] In the prior art, the on-chip spectrometer generally adopts the traditional equal-width array waveguide as the output waveguide. The width of each output channel of the output waveguide is the same, and the distance between adjacent output channels can reach 2.5um. When the distance continues to be reduced, the distance between the output channels The crosstalk phenomenon between them affects the resolution

When the spacing between the output channels is smaller, the resolution of the on-chip spectrometer is higher, and the spacing requirements of equal-width output channels make it more difficult to improve the resolution of the device

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