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Bionic grabbing device for Micro-LED mass transfer and using and manufacturing method

A technology of grabbing device and transfer device, which is applied in semiconductor/solid-state device manufacturing, electrical components, electric solid-state devices, etc., and can solve problems such as high operating cost, high difficulty, and low yield rate

Active Publication Date: 2020-07-03
GUANGDONG UNIV OF TECH
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Problems solved by technology

[0004] The purpose of the present invention is to propose a bionic grasping device for mass transfer of Micro-LEDs and its use and manufacturing method, so as to solve the problems of high operating cost, difficulty and low yield of Micro-LED mass transfer in the existing Micro-LED mass transfer. In addition to the degree, further meet the needs of low cost, easy operation, high yield, high efficiency, etc.

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  • Bionic grabbing device for Micro-LED mass transfer and using and manufacturing method
  • Bionic grabbing device for Micro-LED mass transfer and using and manufacturing method
  • Bionic grabbing device for Micro-LED mass transfer and using and manufacturing method

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Embodiment Construction

[0035] The technical solutions of the present invention will be further described below in conjunction with the accompanying drawings and through specific implementation methods.

[0036] The bionic grasping device used for Micro-LED mass transfer in this embodiment, such as figure 1 As shown, including graphene-based shape memory polymer microstructure film 1 and Micro-LED transfer device 2, such as figure 2 As shown, the graphene-based shape-memory polymer microstructure film 1 includes a polyurethane film substrate 3 and a plurality of graphene-based shape-memory polymer micropillars 4, and a plurality of graphene-based shape-memory polymer micropillars The columns 4 are distributed in an array on the polyurethane film substrate 3;

[0037] The Micro-LED transfer device 2 includes a light source fixing substrate 5, a laser emitting unit 6 and a fixing plate 7, the fixing plates 7 are installed at both ends of the light source fixing substrate 5, the bottom surface of the ...

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Abstract

The invention discloses a bionic grabbing device for Micro-LED mass transfer and a using and manufacturing method of the bionic grabbing device. The device comprises a graphene-based shape memory polymer microstructure film and a Micro-LED transfer device, the graphene-based shape memory polymer microstructure film comprises a polyurethane film substrate and a plurality of graphene-based shape memory polymer micro-columns, the plurality of graphene-based shape memory polymer micro-columns are distributed in an array on the polyurethane film substrate; the Micro-LED transfer device comprises alight source fixing substrate, a laser emission unit and a fixing plate. When the laser emission unit emits a laser beam, the corresponding graphene-based shape memory polymer micro-column is converted from a glassy state to a viscoelastic state. The problems of high operation cost, high difficulty, low yield and the like of existing Micro-LED mass transfer are solved, and the requirements of lowcost, easiness in operation, high yield, high efficiency and the like are further met while the accuracy is ensured.

Description

technical field [0001] The invention relates to the field of semiconductor optoelectronic technology, and in particular to a bionic grasping device for mass transfer of Micro-LEDs and its use and manufacturing method. Background technique [0002] Micro-LED (micro-light-emitting diode) is a component obtained by thinning, miniaturizing, and arraying the LED (light-emitting diode) structure, and its size is at the micron level. Compared with traditional LEDs, Micro-LEDs have the advantages of high energy conversion rate, long service life, short response time, high brightness and resolution. Due to the continuous development and application of LED display technology, Micro-LED is also increasingly used in various display occasions, such as: micro-projection (such as virtual reality equipment), small screen display (such as smart wearable devices), medium and large Large screen display (such as TV), super large screen display (such as outdoor display screen), etc. Due to the...

Claims

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Application Information

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IPC IPC(8): H01L21/67H01L21/683H01L27/15
CPCH01L21/67144H01L21/6835H01L27/156H01L2221/68363
Inventor 丁树权陈云王晗陈新侯茂祥高健刘强
Owner GUANGDONG UNIV OF TECH
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