Field emission enhanced handheld atmospheric pressure plasma generator

Abstract

A field emission enhanced handheld atmospheric pressure plasma generator includes: a main body having a positioning slot, a receiving slot and a gas inlet; a cathode body having a first part positioned in the positioning slot; an anode frame and a positioning member both accommodated within the receiving slot; and a cover having a plasma channel and covering the main body. One or each of two sidewalls of the anode frame and the cathode body facing each other has a nanocarbon material layer. A second part of the cathode body passes through the anode frame, is positioned and fixed by the positioning slot and is separated from the anode frame by a gap. The anode frame and the cathode body receive radio frequency power to make a gas, which enters the receiving slot from the gas inlet and passes through the gap, become plasma outputted from the plasma channel.

Description

technical field [0001] The invention relates to a plasma generating device, and in particular to a field emission handheld atmospheric pressure plasma generating device. Background technique [0002] "Plasma state" or "plasma" (plasma) is the fourth state of matter discovered by human beings after the three states of solid, liquid and gas. It is mainly through the ionization of gas under a high electromagnetic field to form a charge), positive ions (occasionally negative ions), active free radicals and neutral gas molecules are composed of highly reactive gas clusters, which usually emit light by themselves. Under normal conditions, the total number of positive charges in the plasma is approximately equal to the total number of negative charges, and it has a characteristic of being approximately electrically neutral (Quasi-neutral). [0003] At present, plasma technology has been widely used in various industries, such as: optoelectronics and semiconductor industry, 3C and ...

AI Technical Summary

Problems solved by technology

[0004] At present, the relatively mature plasma generation technology is the low-pressure plasma system, which has the advantage of low energy consumption and can generate plasma. However, due to the need to operate in a low-pressure environment, the long time of vacuuming and the size of the cavity limit its applicability and development.

In addition, the vacuum system is more complex and expensive, and the maintenance cost is higher; due to the above limitations, the normal temperature and pressure plasma technology has begun to develop as a replacement for the low pressure plasma system and can be applied in many fields, such as surface treatment and pollutant removal , plasma synthesis, etc.

However, the disadvantage of the atmospheric pressure plasma system compared with the low pressure plasma system is that it needs to consume more energy to generate plasma, so it still needs to be further improved

Images