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Plasmon probe with tapered optical fibers combined with nanowires and working method of plasmon probe

A technology of plasmonics and tapered optical fibers, applied in the field of plasmonic probes, can solve the problems of three-dimensional nanostructure measurement limitations, super-resolution measurement and super-diffraction processing limitations, weak light field, etc., and achieve the impact of measurement environment Small size, high resolution, and the effect of increasing the electromagnetic field density

Active Publication Date: 2020-08-07
XI AN JIAOTONG UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, the local light field of the existing plasmonic probe tip is weak, which makes it limited in super-resolution measurement and super-diffraction processing; and it can only measure the optical and topographical information of the sample surface. Limitations in Measurement of Complex 3D Nanostructures with High Aspect Ratio

Method used

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  • Plasmon probe with tapered optical fibers combined with nanowires and working method of plasmon probe
  • Plasmon probe with tapered optical fibers combined with nanowires and working method of plasmon probe

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Embodiment

[0029] The structure of the novel plasmonic probe with tapered fiber and nanowire in this embodiment is as follows figure 1 and figure 2 As shown, the tapered probe core is formed by chemical wet etching, the cone angle is 32°, and the diameter of the cone tip is 30nm; the material of the metal film covering layer 2 is gold (Au), and the thickness is 80nm; the annular narrow The slot plasmon-enhanced structure 3 is completely etched with an etching depth of 80 nm and an etching width of 100 nm; the nanowire 4 is made of carbon nanotubes with a diameter of 10 nm and a length of 100 nm, and is assembled at the tip of the metal film covering layer 2 .

[0030] Radial light with a wavelength of 632.8nm is coupled to the tapered probe core 1 and propagates in its intrinsic radial waveguide mode 5, and the surface plasmons are excited to propagate on the outer surface of the metal thin film coating 2 through the wave vector matching condition, and at the same time The resonant int...

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Abstract

The invention discloses a plasmon probe with conical optical fibers combined with nanowires and a working method of the plasmon probe. The probe comprises a conical probe fiber core, a metal film covering layer, annular slit plasmon enhancement structures and nanowires, the metal film covering layer is uniformly distributed on the outer surface of the conical probe fiber core, the annular slit plasmon enhancement structures are etched on the metal film covering layer, and the nanowires grow or are assembled at the tip of the metal film covering layer. According to the invention, a plasmon enhancement structure is utilized, larger local field enhancement can be realized at a needle tip, higher resolution and signal detection sensitivity are achieved, and meanwhile, measurement of surface and high aspect ratio complex three-dimensional structure morphology and optical information can be realized in combination with a nanowire structure with a large length-diameter ratio. Wide applicationprospects are realized in the fields of nanometer limit processing, spectral analysis, super-resolution imaging and the like.

Description

technical field [0001] The invention belongs to the fields of nano-limit processing, spectral analysis, super-resolution imaging, etc., and particularly relates to a plasmon probe with a tapered optical fiber combined with a nanowire and a working method thereof. Background technique [0002] Scanning near-field optical microscope can realize optical imaging and chemical composition verification, and can break through the optical diffraction limit, realize nanoscale resolution processing and measurement, and is widely used in near-field Raman detection, near-field super-resolution imaging and near-field optical processing and other fields. The resolution of scanning near-field optical microscopy depends on the near-field probe technology, the most commonly used are aperture probes and non-porous probes. The small cone angle and aperture size of the aperture probe lead to a small light transmittance, weak detection signal, and limited resolution, generally 50nm–100nm. The r...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01Q60/22
CPCG01Q60/22
Inventor 杨树明李少博程碧瑶王飞
Owner XI AN JIAOTONG UNIV
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