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Cantilever beam type MEMS magnetic sensor and preparation method thereof

A cantilever-type, magnetic sensor technology, applied in the field of sensors, can solve the problems of limited acoustic wave disturbance ability, difficulty in increasing disturbance signals, and limited ability to detect weak magnetic fields, etc., and achieves the effect of low cost and easy mass production

Active Publication Date: 2020-08-14
XI AN JIAOTONG UNIV
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Problems solved by technology

However, the dimension elongation or shortening of the magnetostrictive film under the external magnetic field is relatively small, so the disturbance ability to the sound wave is limited. On the one hand, the sensitivity of the device is not high. Resulting in limited ability to detect weak magnetic fields

Method used

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  • Cantilever beam type MEMS magnetic sensor and preparation method thereof
  • Cantilever beam type MEMS magnetic sensor and preparation method thereof

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Embodiment Construction

[0026] The present invention is further described below in conjunction with accompanying drawing:

[0027] see Figure 1 to Figure 2 , a cantilever beam type MEMS magnetic sensor, comprising a silicon-based cantilever beam 1 , a surface acoustic wave device 4 , a magnetostrictive film 5 , and a magnetic mass block 6 . The surface acoustic wave device 4 is arranged above the silicon-based cantilever beam 1 ; the surface acoustic wave device 4 is composed of a piezoelectric film 2 and interdigital electrodes 3 ; the magnetic mass 6 is located at the free end of the silicon-based cantilever beam 1 .

[0028] The cantilever consists of a silicon substrate. The silicon substrate conforms to the semiconductor process, has low cost, and is easy to produce in large quantities.

[0029] The surface acoustic wave device is composed of a piezoelectric film and interdigital electrodes.

[0030] The surface acoustic wave device is a single port or delay line structure. In this embodime...

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Abstract

The invention discloses a cantilever beam type MEMS magnetic sensor and a preparation method thereof. The cantilever beam type MEMS magnetic sensor comprises a cantilever beam, a surface acoustic wavedevice, a magnetostrictive film and a magnetic mass block. The surface acoustic wave device is arranged above the cantilever beam, and the magnetic mass block is arranged at a free end of the cantilever beam; and the magnetostrictive film is arranged above the surface acoustic wave device. The surface acoustic wave device comprises a piezoelectric film and an interdigital electrode; the piezoelectric film is arranged on the upper surface of the cantilever beam, and the plurality of interdigital electrodes are arranged on the piezoelectric film. The invention provides a cantilever beam type MEMS magnetic sensor. Different from a traditional acoustic surface wave magnetic sensor, the cantilever beam type MEMS magnetic sensor is provided with the cantilever beam with the magnetic mass block,so that the sensitivity is improved through the magnetic torque effect; and with the MEMS process, and the prepared sensor is small in size and beneficial to high integration.

Description

technical field [0001] The invention belongs to the technical field of sensors, in particular to a cantilever beam type MEMS magnetic sensor and a preparation method thereof. Background technique [0002] Magnetic sensors are used in various places, such as automotive industry, biomagnetic signal detection, smart home, etc. However, existing magnetic sensors have certain challenges in realizing wireless passive detection. In recent years, acoustic wave-based magnetic sensors have attracted much attention, especially surface acoustic wave magnetic sensors. Since the propagation speed of sound waves is much smaller than that of electromagnetic waves, it is easy to acquire and process magnetic signals along its propagation path. More importantly, devices based on surface acoustic waves can realize wireless passive detection, which proposes an effective way for magnetic sensors to realize wireless passive detection. [0003] The surface acoustic wave magnetic sensor is to pla...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01R33/02G01R33/00B81B7/02B81C1/00
CPCG01R33/02G01R33/0052B81B7/02B81C1/0015B81B2201/0257
Inventor 刘明胡忠强周子尧王志广吴金根程苗苗
Owner XI AN JIAOTONG UNIV
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