A novel flexible force sensitive sensor and its preparation method
A flexible force and sensor technology, applied in the field of sensors, can solve the problems of poor sensing effect and low sensitivity, and achieve the effects of good stability, good electrical conductivity and good electrical conductivity.
Active Publication Date: 2022-04-15
NANJING UNIV OF POSTS & TELECOMM
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Problems solved by technology
In many cases, pressure sensors convert physical force / pressure into structural deformation, which further leads to changes in electrical signals, among which piezoresistive pressure sensors mainly detect pressure data through resistivity, due to their low operating voltage and energy consumption , the advantages of simple fabrication method and device structure make resistive sensors an ideal choice for portable electronic systems. However, most of the current piezoresistive pressure sensors use planar composite elastomers, which have low sensitivity and poor sensing effect.
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[0030] The implementation of the technical solution will be further described in detail below in conjunction with the accompanying drawings. The following examples are only used to illustrate the technical solution of the present invention more clearly, but not to limit the protection scope of the present invention.
[0031] Such as figure 1 and 2 As shown, a novel flexible force sensitive sensor includes a flexible material, an electrode array region and a macrostructure electrode arranged on it, the electrode array region is arranged in the middle of the flexible material, and the macrostructure electrode is arranged on the electrode array On both sides of the region, the electrode array region is integrated with micro-nano carbon materials.
[0032] The electrode array area includes several rectangular squares with the same size and the same interval, and micro-nano carbon materials are integrated on the rectangular squares and between the rectangular squares.
[0033] T...
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The invention discloses a novel flexible force-sensitive sensor and a preparation method thereof. The invention comprises a flexible material, a microstructure electrode array region and a macrostructure electrode thereon, and a micro-nano carbon material combined with the microstructure electrode array region. The invention combines flexible materials, micro-array electrode structures and micro-nano carbon materials, and realizes simple, low-cost, high-sensitivity, multi-dimensional sensing mechanical signal sensing based on the piezoresistive principle. The micro-array electrodes are made on the surface of flexible materials, and the micro-nano carbon materials and the micro-array electrodes are combined to form a sensing area. The preparation method adopts traditional micro-nano processing technology to realize.
Description
technical field [0001] The invention discloses a novel flexible force sensitive sensor and a preparation method thereof, and relates to the technical field of sensors. Background technique [0002] In recent years, with the further development of electronic skin, biomechanics, medical measurement and other fields, people's demand for flexible force-sensitive sensors is more urgent. The wide range of applications of pressure sensors / systems has attracted attention, ranging from health monitoring, human physiological signal detection to artificial prosthetic surgery. In many cases, pressure sensors convert physical force / pressure into structural deformation, which further leads to changes in electrical signals, among which piezoresistive pressure sensors mainly detect pressure data through resistivity, due to their low operating voltage and energy consumption , the manufacturing method and the simple structure of the device make resistive sensors an ideal choice for portable ...
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IPC IPC(8): G01L1/18
CPCG01L1/18
Inventor 刘启发倪永康徐婧郭娅杰赵洁
Owner NANJING UNIV OF POSTS & TELECOMM