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Gas thermal mass flow meter

A technology of mass flowmeter and flowmeter, which is applied in the direction of indirect mass flowmeter and mass flow measuring device, can solve the problems of measurement accuracy deviation, improve measurement accuracy, realize modularization and integration, eliminate turbulent flow and fluid inconsistency The effect of stabilizing fluctuations

Active Publication Date: 2020-10-20
矽翔微机电(杭州)有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0003] The purpose of the present invention is to provide a gas thermal mass flowmeter to solve the problem of measurement accuracy deviation caused by the influence of gas components when the calibration gas and the measurement gas are inconsistent during the use of the existing gas thermal mass flowmeter question

Method used

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Embodiment Construction

[0043] In order to make the above objects, features and advantages of the present invention more comprehensible, specific embodiments of the present invention will be described in detail below in conjunction with the accompanying drawings. It should be understood that the specific embodiments described here are only used to explain the present invention, not to limit the present invention.

[0044] figure 1 Schematic diagram of the structure of the gas thermal mass flowmeter provided in this embodiment, figure 2An exploded view of the structure of the gas thermal mass flowmeter provided in this embodiment, image 3 A schematic diagram of a half-section structure of the flowmeter main body 100 of the gas thermal mass flowmeter provided in this embodiment. Such as Figure 1 to Figure 3 As shown, this embodiment provides a gas thermal mass flowmeter, including a flowmeter body 100, a MEMS sensing element 200 and a control module 700, wherein the flowmeter body 100 has an airf...

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Abstract

The invention provides a gas thermal mass flow meter, relates to the field of gas flow measurement, and is designed for solving the problem of measurement precision deviation caused by the influence of gas components when calibration gas and measurement gas are inconsistent in the use process of an existing gas thermal mass flow meter. The gas thermal mass flow meter comprises a flow meter main body, an MEMS sensing element, a control module, a battery power supply module and a flow straightener, the flow meter main body is provided with an airflow channel for gas to flow; the MEMS sensing element is installed on the flow meter body; a detection part of the MEMS sensing element extends into the gas flow channel; the detection part comprises a mass flow sensor; the MEMS sensing element alsocomprises a thermophysical property sensor, the thermophysical property sensor comprises two thermosensitive elements, and one thermosensitive element is configured to be in contact with the measuredgas; and the mass flow sensor and the thermophysical property sensor are electrically connected with the control module. The gas thermal mass flow meter provided by the invention can realize measurement irrelevant to gas components.

Description

technical field [0001] The invention relates to the field of gas flow measurement, in particular to a gas thermal mass flowmeter. Background technique [0002] The advantage of the gas thermal mass flowmeter is that its measurement results are not affected by changes in ambient temperature and pressure, but when the mass flow is converted to standard volume flow measurement, if the calibration gas is inconsistent with the actual measurement gas, the measurement results will be affected by the gas. Effects of compositional changes. Therefore, when used for trade measurement purposes, it will conflict with existing measurement norms. For industrial gas measurement, a simple gas conversion factor can be used to obtain the repeatability required for measurement, but for the needs of trade measurement, the gas conversion factor cannot fully guarantee the accuracy required for measurement. The accuracy between the gas and the gas used is very necessary for its application in the...

Claims

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Application Information

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IPC IPC(8): G01F1/86
CPCG01F1/86
Inventor 冯勇周昌全黄立基
Owner 矽翔微机电(杭州)有限公司
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