Multi-focus ultrafast laser preparation device and method for micro-channel of micro-fluidic chip

Abstract

The invention discloses a multi-focus ultrafast laser preparation device and method for a micro-channel of a micro-fluidic chip. The method comprises the steps of carrying out femtosecond laser dot matrix ablation of the micro-fluidic chip by utilizing array type multi-focus femtosecond laser, carrying out the secondary ablation by adopting pulse laser, and treating the ablated micro-fluidic chipby combining hydrofluoric acid ultrasonic corrosion to obtain a true three-dimensional micro-channel structure of the micro-fluidic chip, thereby realizing efficient processing of the micro-channel ofthe micro-fluidic chip. The invention discloses a multi-focus ultrafast laser preparation device for the micro-channel of the micro-fluidic chip. The multi-focus ultrafast laser preparation device disclosed by the invention has the advantages of high precision, high efficiency, high safety, high flexibility and large-scale processing, can be widely applied to the fields of biology, chemistry, medical treatment and the like, and has important value and significance and wide development and application prospects.

Description

technical field [0001] The invention belongs to the technical field of ultrafast laser micro-nano processing, and in particular relates to a multi-focus ultrafast laser microfluidic preparation device and method for a microfluidic chip. Background technique [0002] As an emerging analysis and detection technology, microfluidic technology meets the development trend of miniaturization / integration and portability of analytical instruments, can greatly shorten sample processing time, and achieve maximum utilization of reagent consumables through precise control of liquid flow efficiency. The microfluidic chip integrates the basic operating units involved in the fields of biology and chemistry on a chip of several square centimeters, miniaturizes and integrates traditional laboratories, and realizes sampling, dilution, reagent addition, reaction, separation, and detection. And other functions, can be used repeatedly. At present, the materials used for microfluidic chips mainl...

AI Technical Summary

Problems solved by technology

At present, the commonly used microfluidic chip processing methods are limited to planar two-dimensional structure microfluidic channels, and cannot process microfluidic channels with true three-dimensional structures. The use of femtosecond laser micro-nano processing technology can solve this problem well. The laser is focused inside the transparent microfluidic chip substrate material, which can realize three-dimensional micro-nano processing inside the material, thereby ablating a complex three-dimensional microchannel structure

Publication numbers are CN103831536A, CN107243698B, CN108723586B and other Chinese patents have invented the method of using a single beam of femtosecond laser to ablate three-dimensional microchannels in transparent media materials such as fused silica and polymers, but the single-beam femtosecond laser is tightly focused and ablated. The microchannels of etched microfluidic chips also have limitations. It often requires high laser energy or repeated multiple scans to ablate microfluidic channels that meet the structural size requirements, so there is a problem of low processing efficiency. Therefore, an efficient The method of femtosecond laser machining of microfluidic channels is very necessary

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