Polarization beam splitter and forming method thereof
A polarizing beam splitter and polarized light technology, applied in the field of optics, can solve problems such as complex structure, inability to integrate on-chip, and large size
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[0031] Specific implementations of the polarizing beam splitter and its forming method provided by the present invention will be described in detail below in conjunction with the accompanying drawings.
[0032] This specific embodiment provides a polarizing beam splitter, with figure 1 It is a schematic diagram of a top view structure of a polarization beam splitter in a specific embodiment of the present invention, with figure 2 is a schematic cross-sectional view of a polarizing beam splitter in a specific embodiment of the present invention. Such as figure 1 , figure 2 As shown, the polarization beam splitter provided in this specific embodiment includes:
[0033] Substrate;
[0034] A first waveguide 10, a slot waveguide 11, and a second waveguide 12 that are located on the surface of the substrate and extend along a first direction; the first waveguide 10, the slot waveguide 11, and the second waveguide 12 are in Arranged in parallel along a second direction perpen...
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