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Processing method of integrated quartz vibrating beam side electrode

A technology of side electrode and processing method, which is applied in the process of producing decorative surface effects, gaseous chemical plating, metal material coating process, etc., can solve the problems of difficult mechanical alignment and fixing error, deterioration of dimensional accuracy, etc., Achieve the effect of improving machining accuracy, simplifying process flow, and ensuring dimensional accuracy

Pending Publication Date: 2020-11-17
BEIJING AUTOMATION CONTROL EQUIP INST
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Problems solved by technology

[0008] In the above-mentioned Chinese patent CN101363731A, it is difficult to control the mechanical alignment fixation error between the electrode mask and the tuning fork structure by mask evaporation to be within ±5 μm. At the same time, the dispersion caused by the gap between the electrode mask and the tuning fork structure Will further deteriorate the dimensional accuracy

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  • Processing method of integrated quartz vibrating beam side electrode
  • Processing method of integrated quartz vibrating beam side electrode
  • Processing method of integrated quartz vibrating beam side electrode

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Embodiment Construction

[0040] The present invention will be further described below in conjunction with the accompanying drawings and preferred embodiments.

[0041] The processing method of the side electrode of the integrated quartz vibration beam specifically includes the following steps:

[0042] In the first step, the Figure 4 The shown quartz wafer 1 is chemically etched and polished so that the error range of the thickness of the quartz wafer 1 is within ±0.5 microns. The diluted hydrofluoric acid etching solution is selected as the chemical etching agent, and the etching rate is about 0.1 micron per minute by adjusting the concentration of the etching solution and the temperature of the solution, so as to improve the corrosion flatness. A quartz wafer with an initial thickness of 242 microns is put into a hydrofluoric acid etching solution and etched for 10 minutes to make the thickness of the quartz wafer reach 240 microns. After the processing is completed, carry out the standard cleani...

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Abstract

The invention discloses a processing method of an integrated quartz vibrating beam side electrode, which realizes the processing of high-precision side electrodes with different polarities for a quartz vibrating beam sensitive structure by using a glue spraying and side photoetching method, and ensures the dimensional precision of the side electrodes. The relative position error between the electrode and the surface of the tuning fork three-dimensional quartz structure can be controlled within + / -1 micron, electrodes with different polarities can be formed on the same side surface, and the processing error is controlled within + / -2 microns.

Description

technical field [0001] The invention belongs to the technical field of quartz sensitive structure processing, and in particular relates to a method for processing side electrodes of an integrated quartz vibrating beam. Background technique [0002] Quartz vibrating beam accelerometer is a micromechanical sensing device made of quartz crystal, and its sensitive structure is quartz vibrating beam. Quartz vibrating beam accelerometer has the advantages of simple structure, low cost, small weight, low power consumption, and high precision. . [0003] Quartz vibrating beam is the sensitive element of the quartz vibrating beam accelerometer. The basic working principle is based on the piezoelectric effect of quartz crystal. Under the action of the driving force, the fork of the vibrating beam produces continuous vibration with stable frequency and constant amplitude along the direction of the driving axis. , when there is an acceleration input, according to the Coriolis force pr...

Claims

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Application Information

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IPC IPC(8): B81C1/00B82Y15/00B82Y40/00
CPCB81C1/00142B81C1/00166B82Y15/00B82Y40/00B81B2201/0235Y02P70/50
Inventor 苏翼王永胜车一卓唐琼盛洁刘韧李海燕李佳
Owner BEIJING AUTOMATION CONTROL EQUIP INST
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