Nitrogen adjusting device for semiconductor oven

Abstract

The invention belongs to the technical field of semiconductor ovens, particularly relates to a nitrogen adjusting device for a semiconductor oven, and provides the following scheme for solving the problem that nitrogen is not heated. The nitrogen adjusting device comprises a base plate, a nitrogen cylinder, a heating box and a drying box are arranged on an outer wall of the top of the base plate,an electronic air pump is arranged on an outer wall of one side of the heating box, a same third guide roller is arranged at an input end of the electronic air pump and an inner wall of one side of the heating box, a same first guide pipe is arranged at an output end of the nitrogen cylinder and an inner wall of the top of the heating box, and heaters are arranged on two sides of the inner walls of the heating box. According to the device, the heater, the electronic air pump, the heating box, an air injection disc, a spraying nozzle, a fifth guide pipe, a fourth guide pipe, a first electromagnetic valve and a second electromagnetic valve are provided, and when a semiconductor is dried, the heater and the electronic air pump are started, and heated nitrogen is guided into the drying box sothat the semiconductor can be dried and the semiconductor can be prevented from being oxidized.

Description

technical field [0001] The invention relates to the technical field of semiconductor ovens, in particular to a nitrogen regulating device for semiconductor ovens. Background technique [0002] At present, during semiconductor production, semiconductor semi-finished products need to be dried, and semiconductor semi-finished products are extremely prone to oxidation when dried in the air. Therefore, during industrial production, nitrogen gas is added to the oven to prevent semiconductor semi-finished products from being oxidized. [0003] After searching, the Chinese patent authorization number is CN104896908B, which discloses a semiconductor oven nitrogen regulating device, including a box body, a front door, a bracket, an inner tank, an air inlet port, a nitrogen regulating valve, a fan, and a tray. [0004] The above-mentioned patent also has the following disadvantages: when introducing nitrogen gas into the oven, the temperature of the newly released nitrogen gas is low, ...

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Problems solved by technology

[0004] The above-mentioned patent also has the following disadvantages: when introducing nitrogen gas into the oven, the temperature of the newly released nitrogen gas is low, which will reduce the temperature inside the oven, resulting in poor drying effect of semiconductors, which cannot be well processed. The semiconductor is dried, which reduces the drying quality of the oven

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