A semiconductor material processing system

A material processing and semiconductor technology, applied in the direction of polycrystalline material growth, crystal growth, stone processing equipment, etc., can solve the problems of increasing the difficulty of cleaning the outer surface of graphite crucible, increasing the risk factor of crystal manufacturing, and inconvenient cleaning and collection of silica gel film. Achieve the effect of reducing the difficulty of cleaning and measuring, increasing the safety factor, and moving up and down stably

Active Publication Date: 2022-04-15
深圳市凯新达电子有限公司
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] The present invention provides a semiconductor material processing system, which can effectively solve the problem that the graphite crucible inside the crystal furnace is easily deformed due to high temperature during the actual use of the existing crystal furnace, and the graphite crucible The slight deformation of the outer wall makes it inconvenient for personnel to observe, which increases the risk factor in the crystal manufacturing process, and it is inconvenient for users to clean and collect the silica gel film on the outer surface of the graphite crucible, which increases the difficulty of cleaning the outer surface of the graphite crucible. question

Method used

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  • A semiconductor material processing system
  • A semiconductor material processing system
  • A semiconductor material processing system

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Embodiment

[0043] Example: such as Figure 1-15 As shown, the present invention provides a technical solution, a semiconductor material processing system, including a support 1, support rods 2 are fixedly installed at the four corners of the bottom end of the support 1, and support rods 2 are fixedly installed on the top of the support rod 2 and the top edge of the support 1 The protective cover 3, the fixed rod 4 is equidistantly installed in the middle part of the bottom end of the support 1, the cold water jacket 5 is fixedly installed in the middle part of the top end of the fixed rod 4, and the heat insulation plate 6 is fixedly installed at the bottom end of the inner wall of the cold water jacket 5, and the inner wall of the cold water jacket 5 corresponds to heat insulation A graphite resistance heater 7 is fixedly installed on one side of the plate 6, a bottom rotating elevator 8 is fixedly installed in the middle part of the bottom end of the cold water jacket 5, a graphite cruc...

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Abstract

The invention discloses a semiconductor material processing system, which includes a bracket, and support rods are fixedly installed at the four corners of the bottom end of the bracket, and protective sleeves are fixedly installed on the top end of the support rod and the top edge of the bracket, and the bottom end of the bracket There are fixed rods equidistantly installed in the middle. By rotating and positioning the cleaning mechanism, the stability of the graphite crucible during movement can be increased. At the same time, the outer surface of the graphite crucible can be measured and cleaned, which reduces the difficulty of cleaning and measuring the outer surface of the graphite crucible. It solves the phenomenon that the graphite crucible in the prior art is easy to shake when it is running, and at the same time solves the problem that the graphite crucible is not easy to measure and clean in the prior art, thereby improving the operating efficiency of personnel, and can be used without affecting the normal use of the graphite crucible. Under the premise, the safety of the graphite crucible during operation is increased, thereby increasing the safety factor of the device, reducing the damage rate of the device, and thus increasing the service life of the device.

Description

technical field [0001] The invention relates to the technical field of semiconductor material production, in particular to a semiconductor material processing system. Background technique [0002] Semiconductors refer to materials whose conductivity is between conductors and insulators at room temperature. Semiconductors are used in integrated circuits, consumer electronics, communication systems, photovoltaic power generation, lighting, high-power power conversion and other fields. For example, diodes are devices made of semiconductors. , no matter from the perspective of technology or economic development, the importance of semiconductors is very huge. The core units of most electronic products, such as computers, mobile phones or digital recorders, are closely related to semiconductors. , common semiconductor materials include silicon, germanium, gallium arsenide, etc., silicon is the most influential one in the application of various semiconductor materials, and silicon ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C30B29/06C30B15/00C30B15/12C30B15/20B28D5/04B28D5/00
CPCC30B29/06C30B15/00C30B15/12C30B15/20B28D5/04B28D5/0058
Inventor 杨文伟
Owner 深圳市凯新达电子有限公司
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