External-cavity quantum cascade laser
A laser and laser technology, applied in the direction of lasers, phonon exciters, laser components, etc., to achieve the effect of eliminating mechanical instability
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[0246] Fig. 1 shows a Fabry-Perot filter 100 which is part of a wavelength selective interference filter 1 according to the invention. Figure 1a A top view of the Fabry-Perot filter 100 is shown, Figure 1b shows its isometric view, Figure 1c A cross-sectional view thereof is shown. Figure 1d A cross-sectional view of a symmetrically suspended Fabry-Perot filter 100 with mirror elements 101 and 102 is shown.
[0247] The Fabry-Perot filter 100 is a miniature, micromechanical and preferably electrostatically tuned mid-infrared Fabry-Perot type bandpass interference filter 100 comprised of a suitable MIR filter such as silicon or germanium. A first mirror element 101 with a first highly reflective layer 103 and a second mirror element 102 with a second high reflective layer 104 on a transparent substrate 107, the first mirror element and the second mirror element face each other, in There is an air-filled or evacuated gap (cavity) 106 between them, and the gap 106 can be a...
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