Preparation system and process of electronic-grade ammonia fluoride

A technology of preparation system and preparation process, which is applied in the direction of ammonium fluoride, ammonium halide, chemical instruments and methods, etc., can solve the problems of higher and higher purity requirements, and achieve high production efficiency, low cost, and simple overall structure and composition Effect

Active Publication Date: 2020-12-11
福建天甫电子材料有限公司
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0002] Ammonium fluoride is widely used in the field of electronic product production because of its good etching ability. With the rapid development of the electronics industry, the demand for electronic-grade ammonium fluoride is increasing,

Method used

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  • Preparation system and process of electronic-grade ammonia fluoride
  • Preparation system and process of electronic-grade ammonia fluoride
  • Preparation system and process of electronic-grade ammonia fluoride

Examples

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Embodiment

[0032] Please refer to figure 1A preparation system for electronic grade ammonium fluoride provided in this embodiment mainly includes a mixing tank 2, an evaporator, a mixer 1 and a finished product tank, one side of the mixing tank 2 is connected with a hydrofluoric acid intermediate tank, and an industrial grade 49% of high-purity hydrofluoric acid is transported to the middle tank of hydrofluoric acid through the transfer pump and stored for subsequent use. One side of the evaporator is connected with a liquid ammonia storage tank, which stores liquid ammonia raw material, the mixer 1 is connected to the evaporator through a filter tube 3, and a circulation pipe group is connected between the mixer 1 and the mixing tank 2, It is used for circulating pumping of hydrofluoric acid or ammonium fluoride solution, and the finished product tank is connected with the mixer 1 for storing the finished product ammonium fluoride. The entire preparation system is roughly composed of t...

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Abstract

The invention discloses a preparation system and process of an electronic-grade ammonia fluoride. The preparation system mainly comprises a mixing tank, an evaporator, a mixer and a finished product tank; one side of the mixing tank is connected with a hydrofluoric acid intermediate tank; one side of the evaporator is connected with a liquid ammonia storage tank; the mixer is connected with the evaporator through a filter pipe; a circulating pipe group is connected between the mixer and the mixing tank; and the finished product tank is connected with the mixer. The preparation system providedby the invention is simple in structural composition; complex procedures are orderly and simply materialized, so that complexity is decreased; the systematization of an electronic-grade ammonium fluoride production process is realized, and quantitative production of enterprises under relatively economic conditions is facilitated; and the preparation process provided by the invention is operated onthe basis of adopting the basic support of the main body of the above main structure, so that the whole process is ordered and clear, electronic-grade ammonium fluoride finished products can be prepared in batches, and the advantages of relatively economical cost and relatively high production efficiency can be achieved.

Description

technical field [0001] The invention relates to the technical field of material chemistry, in particular to a preparation system and process of electronic-grade ammonium fluoride. Background technique [0002] Ammonium fluoride is widely used in the field of electronic product production because of its good etching ability. With the rapid development of the electronics industry, the demand for electronic-grade ammonium fluoride is increasing, and the purity requirements for ammonium fluoride are also increasing. At present, there is no mature system and process on the market that can relatively economically and directly produce electronic-grade ammonium fluoride aqueous solution. [0003] In view of this, this application is proposed. Contents of the invention [0004] The first object of the present invention is to provide a preparation system for electronic-grade ammonium fluoride. The preparation system is simple in composition, realizes simplification, and can realize...

Claims

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Application Information

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IPC IPC(8): B01J19/18B01J4/00B01J10/00C01C1/16
CPCB01J19/0066B01J19/18B01J10/00B01J4/001C01C1/162B01J2204/002
Inventor 吴全贵郑义达李文斌吴俊贤陈国民骆彦成赖延恩
Owner 福建天甫电子材料有限公司
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