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Photoelectric detector based on ferroelectric semiconductor and thin-layer two-dimensional material

A technology of photodetectors and two-dimensional materials, applied in the direction of semiconductor devices, circuits, electrical components, etc., can solve the problems of no photodetectors, etc., and achieve the effects of improving photoelectric responsivity, increasing spectral bandwidth, and simple structure

Inactive Publication Date: 2020-12-11
XI AN JIAOTONG UNIV
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Problems solved by technology

[0004] A photodetector device that combines ferroelectric materials with two-dimensional materials can realize the expansion of the detection spectral range, and at the same time use the polarization of the ferroelectric layer to realize the regulation of the device, thereby improving the responsivity and gain of the photodetector device. However, the existing technology Similar photodetectors do not appear in

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  • Photoelectric detector based on ferroelectric semiconductor and thin-layer two-dimensional material
  • Photoelectric detector based on ferroelectric semiconductor and thin-layer two-dimensional material
  • Photoelectric detector based on ferroelectric semiconductor and thin-layer two-dimensional material

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Embodiment Construction

[0021] The present invention is described in further detail below in conjunction with accompanying drawing:

[0022] refer to figure 1 The photodetector based on ferroelectric semiconductor and thin-layer two-dimensional material according to the present invention comprises a doped silicon substrate 1, a dielectric layer 2, a two-dimensional material thin film layer 4, and an alpha-indium selenide two-dimensional ferroelectric semiconductor layer 3 and two metal electrodes 5, wherein the doped silicon substrate 1, dielectric layer 2, two-dimensional material film layer 4 and α-indium selenide two-dimensional ferroelectric semiconductor layer 3 are distributed sequentially from bottom to top, and one metal electrode 5 is located on the α-indium selenide two-dimensional ferroelectric semiconductor layer 3 , and another metal electrode 5 is located on the hafnium dioxide dielectric layer 2 .

[0023] The thickness of the dielectric layer 2 is 10-15nm; the thickness of the α-indi...

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Abstract

The invention discloses a photoelectric detector based on a ferroelectric semiconductor and a thin-layer two-dimensional material, and the photoelectric detector comprises a doped silicon substrate, adielectric layer, a two-dimensional material film layer, an alpha indium selenide two-dimensional ferroelectric semiconductor layer, and two metal electrodes. The doped silicon substrate, the dielectric layer, the two-dimensional material film layer and the alpha indium selenide two-dimensional ferroelectric semiconductor layer are sequentially distributed from bottom to top, one metal electrodeis located on the alpha indium selenide two-dimensional ferroelectric semiconductor layer, the other metal electrode is located on the hafnium oxide dielectric layer, and the detector can expand the response spectrum bandwidth and improve the responsivity.

Description

technical field [0001] The invention relates to a photodetector of a two-dimensional material, in particular to a photodetector based on a ferroelectric semiconductor and a thin-layer two-dimensional material. Background technique [0002] Since graphene was obtained by mechanical exfoliation, graphene has received extensive attention and research in many fields due to its superior structural, optical, and optoelectronic properties. With the in-depth study of graphene, scientists have discovered many two-dimensional materials with similar structures, including hexagonal boron nitride similar to graphene, graphene oxide, etc., in addition to transition metal chalcogenides and other two-dimensional oxide materials Wait. Two-dimensional materials represented by graphene have good photoelectric response characteristics, can achieve wide spectral response and improve response sensitivity. [0003] Ferroelectric materials, as a class of materials with polarization characteristic...

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Application Information

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IPC IPC(8): H01L31/101H01L31/0216H01L31/0352H01L31/0392
CPCH01L31/02161H01L31/035272H01L31/0392H01L31/101
Inventor 牛刚孙延笑赵金燕史鹏任巍
Owner XI AN JIAOTONG UNIV
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