38 results about "Hafnium dioxide" patented technology

The present disclosure provides a new wet atomic layer etch (ALE) process for etching high-k dielectric materials. More specifically, the present disclosure provides various embodiments of methods that utilize new etch chemistries for etching transition metal oxide dielectric materials in a cyclic wet ALE process. In the example embodiments provided herein, new etch chemistries and methods are provided for etching zirconium dioxide (ZrO2), hafnium dioxide (HfO2) and HfxZr(1-x)O2 dielectrics in a cyclic wet ALE process. However, the wet ALE techniques described herein are not strictly limited to the example materials discussed herein and can be applied to other transition metals and transition metal oxides.

Disclosed in the present invention are a thin film deposition device and a deposition method, relating to the technical field of semiconductors. The thin film deposition device comprises an ALD main body, a hafnium source filter, and a hafnium source pipe. Two ends of the hafnium source filter are respectively connected to the ALD main body and the hafnium source pipe; the ALD main body has a deposition chamber, and the hafnium source pipe is in communication with the deposition chamber via the hafnium source filter; and the hafnium source pipe is used for introducing hafnium(IV) chloride gas into the deposition chamber, and the hafnium source filter is used for filtering hafnium(IV) chloride particles from the hafnium(IV) chloride gas. The thin film deposition device provided in the present invention can significantly improve the deposition quality of a hafnium(IV) oxide thin film.

The application discloses an AR film with excellent durability, which comprises a substrate layer, wherein an upper coating layer, a primer layer, a first niobium oxide layer, a silicon dioxide layer, a second niobium oxide layer, a silicon-aluminum mixed layer and an anti-scratch layer are sequentially arranged on the substrate layer; wherein a hafnium dioxide layer is arranged between the first niobium oxide layer and the silicon dioxide layer or between the second niobium oxide layer and the silicon-aluminum mixed layer; and the thickness of the hafnium dioxide layer is 1-20 nm. The AR film with excellent durability has excellent optical performance, high hardness, wear resistance and high-temperature resistance, and excellent durability.

An inkjet printer printhead, an element or other component thereof, has an internal cavity with a protective coating. Other surfaces of the component may have the protective coating. To prepare the protective coating, a target thickness for the HfO2 (hafnium dioxide) film is selected to avoid pinhole formation, thin spot and nodule growth. A HfO2 film is deposited on the component as a conformal layer, including on a surface of the internal cavity, using atomic layer deposition (ALD) process-adjusted for the target thickness to form a coated component. A non-wetting coating may be included on the HfO2 film.

The present disclosure relates to memristor devices for neuromorphic computing. A memristor device may include a first electrode, an oxide layer, an interface layer fabricated on the oxide layer, and a second electrode fabricated on the interface layer. The first electrode may include a noble metal and / or an inert metal, such as platinum, palladium, iridium, tungsten, molybdenum, ruthenium, etc. The oxide layer may include a dielectric oxide, such as silicon dioxide, hafnium dioxide, tantalum pentoxide, etc. The interface layer may include a discontinuous layer of a  dielectric material,  such as Al2O3, Y2O3, MgO, etc. The second electrode may include one or more metallic materials that may provide metal ions in response to the application of a suitable voltage to the memristor device, such as copper, silver, etc. In some embodiments, the memristor device may further include an interface layer positioned between the first electrode and the oxide layer.

The application belongs to the field of coating technology, and relates to a laser protective lens high-damage threshold coating method based on a semiconductor wafer process, comprising the following steps: sequentially performing ultrasonic cleaning and plasma activation on an optical lens substrate to obtain a pretreated lens; alternately depositing hafnium dioxide film layers and silicon dioxide film layers on the surface of the pretreated lens by using a double-target co-sputtering process to obtain a coated lens; using trimethylaluminum and ozone as precursors, growing an aluminum oxide packaging layer on the surface of the coated lens by using an atomic layer deposition process, and then performing gradient annealing treatment to obtain a laser protective lens. The whole process is systematically optimized from interface bonding, film layer structure to surface packaging. Through the synergistic effect of optimizing each link of the coating process, the intrinsic quality of the film layer is improved while the environmental adaptability is enhanced, so that the lens can withstand long-term irradiation of high-power laser, and the damage resistance and long-term stability of the laser protective lens are significantly improved.

This invention relates to the field of semiconductor technology and discloses a trench-type SiC MOSFET structure. The SiC MOSFET structure includes a back metal layer, an N+ substrate on top of the back metal layer, an N- epitaxial layer on top of the N+ substrate, a trench etched on top of the N- epitaxial layer, and a P-type region at the bottom of the trench. A thick oxide layer is provided at the bottom inner edge of the trench, and a gate dielectric layer covers the inner sidewalls of the trench. The gate dielectric layer is filled with a polycrystalline gate. P-type body regions are distributed on top of the N- epitaxial layer and on both sides of the trench, and N+ source regions are embedded within the P-type body regions. An interlayer dielectric layer is provided on top of the N+ source regions, and a front metal layer is provided on top of the interlayer dielectric layer. This invention deposits hafnium dioxide as an insulating dielectric layer at the bottom inner edge of the trench, utilizing the high breakdown field strength of hafnium dioxide to improve the avalanche resistance and reliability of the product.

This invention discloses a radiation-resistant glass, its preparation method, and its application. The radiation-resistant glass comprises the following components in weight percentage: silicon dioxide 60%-70%; sodium oxide 13%-18%; zinc oxide 3%-6%; aluminum oxide 2%-6%; boron trioxide 1%-6%; strontium oxide 1%-3%; cerium dioxide 4.7%-5.5%; lanthanum trioxide / hafnium dioxide 1%-3%; and ammonium difluoride 0.3%-1%. The technical problem to be solved is to significantly improve the high-energy particle radiation protection and light transmittance of the glass by selecting a specific formulation.

The invention provides a synthesis method of a high-purity hafnium-zirconium metal complex precursor, and belongs to the technical field of high-dielectric-constant materials for super-large-scale integrated circuits. According to the method, hafnium tetrachloride or zirconium tetrachloride is used as a metal source and sequentially reacts with dialkylamine, n-butyllithium and an alkyl magnesium halide Grignard reagent through a one-pot method in a high-purity inert atmosphere, an intermediate does not need to be separated, and a target precursor is obtained after filtration, washing and rectification. The method is simple and convenient in process operation, mild in reaction condition and low in energy consumption; the raw materials are wide in source and low in price, the product yield reaches 82%-88%, and the metal purity is stabilized to be 6N; when the precursor is used for preparing a hafnium oxide / zirconium thin film through atomic layer deposition (ALD), the thickness of the thin film reaches 14.3 nm under 100 cycles, the non-uniformity is smaller than or equal to 0.90%, the requirement of a gate dielectric layer of a super-large-scale integrated circuit for a high-purity and high-efficiency precursor can be met, and the precursor is suitable for industrial amplification production.

The invention discloses a method for preparing hafnium dioxide by electrolyzing hafnium tetrachloride, in the method, relatively pure hafnium dioxide is prepared by electrolyzing hafnium tetrachloride, the whole process flow is simple, and the electrolysis efficiency is high. The method comprises the following steps: preparing an HfCl4 solution; adjusting the HfCl4 solution to a sedimentation critical state by using NaOH particles; an electrode plate is inserted into the electrolytic cell, and the HfCl4 solution in the settling critical state serves as electrolyte to be injected into the electrolytic cell; carrying out water bath heating on the electrolytic bath to a preset temperature, and keeping the preset temperature unchanged; starting a direct-current power supply of the electrolytic bath, and keeping a constant-current state, so that the electrolyte reacts; carrying out centrifugal separation on the electrolyte after the reaction, and washing and drying precipitates obtained by centrifugal separation; and calcining the dried precipitate to obtain hafnium oxide.

This application provides a ferroelectric thin-film capacitor and its fabrication method, a ferroelectric memory, and an electronic device. Each ferroelectric thin-film capacitor in the ferroelectric memory includes two electrode layers and a ferroelectric layer, with the ferroelectric layer located between the two electrode layers. The ferroelectric layer comprises hafnium dioxide material and includes at least one first doped region, in which a first doping element is doped. The atomic radius of the first doping element is smaller than the atomic radius of the hafnium element in the ferroelectric layer. The ferroelectric memory of this application can achieve higher crystallization quality under low-temperature rapid thermal crystallization conditions, thereby reducing operating voltage and power consumption, and improving storage reliability.

The invention belongs to the technical field of LED manufacturing, particularly relates to a UVB LED chip and a preparation method, and aims to improve the light transmittance of the UVB LED chip. The UVB LED chip comprises a substrate, an antireflection film, a filtering film, an N-type semiconductor layer, an active layer and a P-type semiconductor layer. The antireflection film is located on the surface of one side of the substrate, the filtering film is located on the side, away from the substrate, of the antireflection film, the N-type semiconductor layer is located on the side, away from the substrate, of the filtering film, the active layer is located on the side, away from the substrate, of the N-type semiconductor layer, and the P-type semiconductor layer is located on the side, away from the substrate, of the active layer. Wherein the material of the anti-reflection film comprises at least one of magnesium fluoride, aluminum fluoride and aluminum oxide, the thickness of the anti-reflection film is lambda / 4n, lambda is the target wavelength of the anti-reflection film, and n is the material refractive index of the anti-reflection film. The filtering film is a single-layer or multi-layer interference filtering film, and the material of the filtering film comprises at least one of titanium oxide, hafnium oxide, aluminum oxide, silicon dioxide and aluminum fluoride.

The invention belongs to the field of medical detection, and particularly relates to a memristor for non-invasive dynamic ovulation monitoring and application. The memristor comprises a substrate, a bottom electrode, a functional layer and a top electrode which are sequentially arranged from top to bottom, wherein the functional layer is a hafnium oxide film. The memristor provided by the invention has the characteristic of ultrahigh sensitivity to electrical property changes of ion concentration and viscosity in biological fluids such as saliva, urine and the like, and a complex physiological state under regulation and control of hormones such as estrogen, LH and the like is converted into a quantifiable electric signal to be output, so that dynamic and accurate capture of a growth window is realized. The low power consumption and stable cycle characteristics of the device lay a solid foundation for developing wearable integrated equipment, and the device is expected to promote the development of reproduction management towards the family, real-time and intelligent directions, and finally the success rate and safety of assisted reproduction treatment are improved.

The invention provides a hafnium oxide-based nano-drug as well as a preparation method and application thereof, and belongs to the technical field of nano-medicines. The preparation method comprises the following steps: mixing a hafnium chloride solution and an alkali solution, and carrying out hydrothermal reaction to obtain hafnium dioxide; mixing a bovine serum albumin solution and the hafnium oxide suspension, and performing centrifugal separation to obtain BSA modified hafnium oxide; adding a doxorubicin aqueous solution into the BSA modified hafnium oxide dispersion liquid for reaction to obtain doxorubicin-loaded hafnium oxide; and adding a potassium permanganate solution into the dispersion liquid of the doxorubicin-loaded hafnium oxide, and carrying out ultrasonic treatment to obtain the hafnium oxide-based nano-drug. The hafnium oxide-based nano-drug provided by the invention is a nano-drug capable of regulating and controlling the tumor microenvironment and combining the radiotherapy and chemotherapy functions, and can significantly improve the treatment response and benefit of patients.

The invention belongs to the technical field of functional material preparation, and provides GYbZ powder for PS-PVD spraying and a preparation method of the GYbZ powder. The preparation method comprises the following steps: mixing powder preparation raw materials with water, and carrying out ball milling to obtain slurry; sequentially carrying out spray granulation and drying on the slurry to obtain a granular material; and sintering and spheroidizing the granular material by adopting plasma flame, and crushing the obtained spheroidized powder to obtain the GYbZ powder, raw materials for preparing the powder comprise the following components in percentage by mass: 38-42% of zirconium dioxide, 5-8% of ytterbium trioxide, less than or equal to 1.0% of hafnium oxide and the balance of gadolinium trioxide. According to the method, the granular material is sintered and spheroidized by adopting plasma flame, so that pores in the final GYbZ powder are relatively few. Data of the embodiment shows that the porosity of the obtained GYbZ powder is 15-19%.

This invention discloses a ceramic clay composition, ceramics, and their applications, relating to the field of ceramic technology. The ceramics of this invention are obtained by sequentially processing the ceramic clay composition through a process of material conditioning, sieving, casting, air drying, oven drying, and sintering. The introduction of specific proportions of ceramic waste A and B, modified particles with a gallium-coated cuprous oxide core and an alumina shell, and high-entropy oxide solid solutions generated from the reaction of hafnium dioxide, tantalum pentoxide, niobium pentoxide, titanium dioxide, zirconium dioxide, chromium trioxide, and carbon powder, as well as chromium heptacarbonide, into the ceramic clay composition gives the ceramics prepared from the ceramic waste excellent fracture toughness, flexural strength, wear resistance, high-temperature resistance, and self-healing ability. Therefore, this invention has broad application prospects.

The application belongs to the field of ferroelectric material preparation, and specifically provides a preparation method of a samarium-doped hafnium dioxide ferroelectric film with high residual polarization value. First, hafnium salt and samarium salt are used as raw materials to prepare a clear light yellow samarium-doped hafnium dioxide precursor solution, then the precursor is coated on a treated platinum substrate according to experimental requirements, and finally, the Sm-HfO2 ferroelectric film with high residual polarization value is obtained through drying, preheating and annealing treatment. The hafnium oxide-based ferroelectric film prepared by the chemical solution method can realize accurate control of the film thickness, has good film uniformity, is simple to operate, has flexible and controllable doping element content, has simple equipment requirements, is low in cost, is repeatable in process, and is easy to realize industrialized production.

A ferroelectric device and methods of forming the same are described. In some embodiments, the method includes depositing a doped hafnium dioxide layer on a layer, and the doped hafnium dioxide layer has a first oxygen vacancy concentration. The method further includes performing an ultra-high vacuum anneal process on the doped hafnium dioxide layer to increase the first oxygen vacancy concentration to a second oxygen vacancy concentration and performing an oxygen anneal process on the doped hafnium dioxide layer to decrease the second oxygen vacancy concentration.

A functionally graded firing setter that includes a substrate layer of cubic oxide; a top layer of unstabilized zirconium dioxide / hafnium dioxide; and a continuous transitional gradient layer disposed between the substrate layer and the top layer. The continuous transitional gradient layer includes cubic oxide stabilized zirconium dioxide / hafnium dioxide. The cubic oxide can be calcium oxide (CaO) or magnesium oxide (MgO).

This invention discloses a method for synthesizing monoclinic hafnium dioxide nanorods. The method uses hafnium oxide and potassium hydrofluoric acid as raw materials, and synthesizes uniform monoclinic hafnium dioxide nanorods through a two-step process of high-temperature calcination and subsequent hydrolysis. This method utilizes common, simple, and readily available raw materials, has a short reaction time and low reaction temperature, avoids complex procedures, and simplifies the process. The synthesized monoclinic hafnium dioxide nanorods are uniform in size and exhibit minimal agglomeration. This invention also discloses the application of the monoclinic hafnium dioxide nanorods synthesized by the above method in coating plastic or metal surfaces.

The application provides a hafnium-based modified nanofluid for coating pretreatment and a preparation method and application thereof, and relates to the technical field of coating pretreatment products. The method comprises the following steps: adding concentrated sulfuric acid, ammonium hydrogen fluoride, hydrogen peroxide solution and sodium stearate into pure water in sequence to obtain a mixed solution; adding hafnium dioxide into the mixed solution to obtain a modified hafnium oxide salt solution; mixing a heteroatom chelating polymer with pure water to obtain a polymer chelating agent; mixing the modified hafnium oxide salt solution with the polymer chelating agent according to a proportioning ratio, adding a neutralizing agent to adjust the PH value of the solution, and finally obtaining a pure liquid hafnium-based modified nanofluid through cooling and filtration. The hafnium-based modified nanofluid exists in the form of a solution reagent, is added into a mature silane taming as a core additive substance, greatly improves the corrosion resistance of a film layer, greatly improves the corrosion resistance of a bare film, and ensures the coating effect.

The utility model discloses ball milling equipment for producing hafnium oxide, and relates to the technical field of ball milling equipment. The device comprises a mounting plate and a ball mill, two mounting frames are fixedly connected to the side, close to the ball mill, of the top end of the mounting plate, fixing blocks are fixedly connected to the top ends of the mounting frames, connecting rods distributed at equal intervals are fixedly connected to the outer sides of the fixing blocks, and hammering heads are fixedly connected to the ends, away from the first rotating rods, of the connecting rods. The bottom end of the hammering head is positioned above the ball mill; when a second rotating rod and an eccentric wheel rotate, one end of a connecting base is limited through cooperation between the eccentric wheel and a connecting block and a first rotating rod, and when the eccentric wheel rotates, a hammering head is driven to vertically swing around a rotating shaft of the first rotating rod, so that knocking operation on the top of a mounting plate is achieved, and materials attached to the inner wall of the mounting plate are shaken off; therefore, the impact frequency of the grinding balls and the materials is increased, and the grinding efficiency of the materials is further improved.

The embodiment of the present application provides a ferroelectric thin film capacitor and a preparation method of the ferroelectric thin film capacitor, the structure of the ferroelectric storage capacitor provided by the present application comprises: a first metal electrode; a second metal electrode; a ferroelectric layer, which is arranged between the first metal electrode and the second metal electrode; wherein the material of the ferroelectric layer is a zirconium-doped hafnium dioxide material, and the zirconium-doped hafnium dioxide material is doped with nitrogen elements, the ferroelectric thin film capacitor can passivate oxygen vacancies generated under the influence of high temperature in the process of thin film deposition by in-situ injection of nitrogen elements in the zirconium-doped hafnium dioxide ferroelectric layer; in addition, in the process of using the ferroelectric thin film capacitor, the electric defects can be reduced by filling oxygen vacancies in the ferroelectric layer, so that the ferroelectric thin film imprinting effect and the breakdown phenomenon caused by the accumulation of oxygen vacancies are improved, and the performance and service life of the ferroelectric thin film capacitor are improved.

The invention discloses a high-pressure-resistant corrosion-resistant nano-composite coating material for a tank body of an oil tank truck and a preparation method of the high-pressure-resistant corrosion-resistant nano-composite coating material, and relates to the technical field of protective coatings. Nano titanium carbide and nano hafnium oxide which are pretreated by a specific coupling agent are compounded to serve as a double-nano reinforced phase, and the nano titanium carbide and the nano hafnium oxide have a synergistic effect to realize improvement of multiple properties; nano rare earth oxide is introduced as an interface regulator, the interface bonding state of double nanophase and a polyimide matrix is effectively optimized, meanwhile, specific technical parameters of the steps of matrix liquid preparation, nanophase dispersion liquid preparation, composite slurry preparation, coating curing and the like are refined, it is ensured that the coating performance is stable and uniform, industrial batch production can be achieved, and the application prospect is wide. The protection device is suitable for long-acting protection of tank bodies of oil tank trucks for transporting various refined oil products and chemical raw materials, and has wide application prospects and practical values.

A memory array includes a plurality of memory cells including a first electrode, a second electrode and a layer of crystalline active material disposed between the first electrode and the second electrode and having a thickness of between 2 nm and 20 nm, the active material being either hafnium dioxide doped with a doping element selected from one of the following elements: Si, Al, Zr, Gd, Ge, Y or N, or an alloy HfxZr1-xO2 undoped or doped with a doping element selected from one of the following elements: Si, Al, Gd, Ge, Y or N, with 0<x<1; the first or second electrodes being formed of at least two layers including a first conductive layer in contact with the layer of active material and selected to create oxygen vacancies in the layer of active material and a second conductive layer disposed on the first conductive layer.

The invention relates to the technical field of optical films, in particular to a high-wear-resistance anti-dazzle antireflection optical film and a preparation method thereof. The anti-dazzle wear-resistant optical film comprises an optical substrate, a bonding layer, an anti-reflection functional layer and a composite anti-dazzle wear-resistant layer, and the composite anti-dazzle wear-resistant layer comprises the following raw materials: nanometer aluminum oxide particles, nanometer silicon dioxide particles, a silane coupling agent and a hydrolysis catalyst. According to the invention, the hafnium oxide-aluminum oxide mixture and the silicon dioxide are adopted to alternately construct a gradient refractive index film system, so that the interface stress is essentially reduced; meanwhile, a composite anti-dazzle wear-resistant layer composed of boehmite nanorods, nano silicon dioxide and a silane coupling agent is designed, so that the film obtains excellent mechanical durability while achieving wide-spectrum ultra-low reflection and effective anti-dazzle, the industrial problems that a film layer is easy to peel off and an anti-dazzle microstructure is easy to wear are fundamentally solved, and the anti-dazzle wear-resistant film has good application prospects. And the high-performance and long-service-life optical thin film suitable for severe environments and high-frequency interaction scenes is successfully prepared.

The invention discloses a rhombohedral phase manganese-zirconium co-doped hafnium oxide ferroelectric film material and a preparation method thereof. The ferroelectric film material structure sequentially comprises a single crystal substrate layer, a bottom electrode layer and a ferroelectric material layer from bottom to top, wherein the ferroelectric material layer is composed of a single-layer uniform film, and the material forming the ferroelectric material layer is manganese-zirconium co-doped hafnium oxide with a ferroelectric stable rhombohedral phase structure. The preparation method comprises the following steps: annealing a single crystal substrate, and sequentially preparing the bottom electrode layer and the ferroelectric material layer on the annealed single crystal substrate layer by using a pulse laser deposition method. The stable rhombohedral phase is prepared, regulated and controlled in the hafnium oxide-based thin film for the first time through component and substrate stress design, and due to unique manganese-zirconium co-doping and stress conditions provided by the substrate, the ferroelectric phase structure can stably maintain the rhombohedral phase, so that the excellent stable ferroelectric performance can be maintained; and development and application of devices such as ferroelectric transistors and ferroelectric tunnel junctions mainly made of hafnium oxide ferroelectric materials are facilitated.

The invention provides a display device for improving light extraction efficiency and a preparation method thereof, and belongs to the technical field of photoelectron manufacturing. The display device comprises a light-emitting block, a flat layer, a metal electrode layer and a hyperbolic metamaterial layer, the light-emitting block is located on the surface of the metal electrode layer, the flat layer is located on the surface of the metal electrode layer and covers the light-emitting block, and the hyperbolic metamaterial layer is located on the flat layer and covers the light-emitting block. The orthographic projection of the light-emitting block on the surface of the metal electrode layer is located in the orthographic projection of the hyperbolic metamaterial layer on the surface of the metal electrode layer; the hyperbolic metamaterial layer comprises a plurality of hafnium dioxide layers and a plurality of zirconium dioxide layers which are alternately stacked. According to the embodiment of the invention, evanescent waves formed by total internal reflection can be collected, and the light extraction efficiency of the display device is improved.

Multilayer structure for passive radiative cooling. The invention relates to a multilayer structure (1) for passive radiative cooling, comprising: - a basic reflective layer (2) made of silver or aluminum, - a stack (3) deposited on the reflective layer and comprising at least two and at most five superimposed emissive layers (4, 5, 6), each emissive layer being continuous and of uniform thickness, at least one of the emissive layers (4) being made of hafnium dioxide, at least one other of the emissive layers (5, 6) being made of an oxide, other than hafnium dioxide, a nitride, or an oxynitride, the multilayer structure having a thickness of between 0.5 and 2 µm. Figure for the abstract: Fig. 1

The invention discloses a cable joint detector protective shell with heat dissipation protection, which comprises a shell body, the shell body comprises a substrate layer, the inner side of the substrate layer is provided with an inner protective layer, the inner protective layer comprises an aluminum oxide coating and a hafnium oxide coating, the outer side of the substrate layer is provided with an outer protective layer, and the outer protective layer is provided with a heat dissipation layer. The outer protection layer comprises a nano chromium oxide coating and an RB-048 anti-static coating, heat dissipation holes are formed in the left side and the right side of the top of the shell and the upper ends of the left side and the right side of the shell, and the hafnium oxide coating is arranged on the inner side of the substrate layer in a coating mode. The inner protection layer is arranged, the aluminum oxide coating contained in the inner protection layer can improve the oxidation resistance of the inner side of the shell, the hafnium oxide coating can improve the fire resistance of the inner side of the shell after the aluminum oxide coating is damaged, the outer protection layer is arranged, and the RB-048 anti-static coating contained in the outer protection layer can improve the anti-static property of the outer side of the shell. And after the RB-048 anti-static coating is damaged, the wear resistance of the outer side of the shell can be improved by the nano chromium oxide coating.