Passive wireless temperature sensor based on mechanical metamaterial structure

Abstract

The invention provides a passive wireless temperature sensor based on a mechanical metamaterial structure, the temperature sensor comprises a substrate, and at least one temperature sensing unit and astrain sensing unit which are arranged on the substrate, and the strain sensing unit comprises a mechanical metamaterial structure, an LC resonance circuit and a plurality of insulating support pieces, wherein the mechanical metamaterial structure is connected with at least one temperature sensing unit so as to receive single-direction strain generated by the temperature sensing unit due to temperature change and convert the single-direction strain into multi-direction strain, and the LC resonance circuit is connected with the mechanical metamaterial structure through a plurality of insulating supporting pieces, so that resonant frequency changes are generated under multi-direction strain, the resonant frequency is measured in a non-contact mode in a mutual inductance coupling mode, and temperature measurement is achieved. A passive wireless measurement mode is adopted, so the temperature sensor is low in power consumption and easy to measure and has the advantages of being simple instructure, small in measurement error, compatible in process and the like.

Description

technical field [0001] The invention belongs to the technical field of microelectronic devices, and in particular relates to a passive wireless temperature sensor based on a mechanical metamaterial structure. Background technique [0002] A temperature sensor is a sensor that converts changes in ambient temperature into electrical quantities. According to the principle, it can be divided into capacitive, resistive, thermocouple and MEMS temperature sensors. It is widely used in meteorological detection, industrial control, security alarms, etc. field. With the development of MEMS technology, temperature sensors tend to be miniaturized. Micro temperature sensor is a new type of temperature sensor manufactured by MEMS technology. Compared with traditional temperature sensors, micro temperature sensor has the advantages of small size, easy integration, low power consumption, and low cost. It is also indispensable for the realization of the Internet of Everything in an informat...

AI Technical Summary

Problems solved by technology

However, the current temperature sensor still has the defects of low sensitivity, large error and high power consumption

Images