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Image focusing method of femtosecond laser system

A technology of femtosecond laser and system image, which is applied in the field of femtosecond laser system image focusing, to achieve the effect of simple operation steps, easy construction and use, and low requirements

Active Publication Date: 2020-12-18
JILIN UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, after comprehensively considering factors such as the specific system layout and application requirements, each method has its own shortcomings.

Method used

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  • Image focusing method of femtosecond laser system
  • Image focusing method of femtosecond laser system
  • Image focusing method of femtosecond laser system

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0040] In the processing optical path of the femtosecond laser system, the laser focusing point on the substrate surface is found by the scratch method.

[0041] After the substrate is cleaned and glued, it is fixed on the processing platform, and ink marks are made on the non-glue area with a marker pen. Based on the femtosecond laser system to process the optical path, adjust the z-axis position of the microscope so that the laser can carve scratches on the ink marks. Repeat this operation until the light spot draws a uniform and uninterrupted continuous scratch on the ink mark, which indicates that the photolithography microscope focuses the laser spot on the upper surface of the substrate.

[0042] In the processing optical path of the femtosecond laser system, the laser focus point on the substrate surface is found by the scratch method. The specific steps are as follows:

[0043] (1), processing sample preparation:

[0044] The specific steps are as follows: wipe the m...

Embodiment 2

[0051] The cylindrical test structure is processed by the femtosecond laser system image focusing method.

[0052] After finding the focus position of the laser spot by means of the laser across the ink marks on the surface of the substrate, and then based on this position, determine and fix the corresponding position of the object in the focusing optical path, and indirectly reflect the focus state of the laser with the clarity of the imaging state. If the CCD is at the same position, both a clear substrate surface and a clear fringe image can be observed, indicating that the focus is accurate. In subsequent processing, in order to make up for the height difference between different substrates, it is only necessary to fine-tune the z-direction position of the processing objective lens to make the fringes clear, then find the focal plane position and start processing. After the processing is completed, the substrate is processed and the processing results are analyzed.

[005...

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Abstract

The invention discloses a femtosecond laser system image focusing method, and belongs to the technical field of femtosecond laser system direct writing processing. The method comprises the steps: finding a laser spot focusing position by means of a mode that laser scratches ink marks on the surface of a substrate, fixing three adjusting hardware, namely a CCD, a processing objective lens and a piezoelectric platform, and taking the position of an object as a unique adjusting variable; determining and fixing a corresponding position of an object in the focusing light path, and indirectly reflecting a laser focusing state by imaging state definition. If the CCDs are located at the same position, a clear substrate surface can be observed, the clear stripe imaging can also be observed, and itis indicated that focusing is accurate. In subsequent processing, in order to compensate the height difference between different substrates, only the z-direction position of the processing objective lens needs to be finely adjusted to enable stripes to be clear. According to the focusing method, an original light path structure does not need to be changed, temporary building and application are quite easy to achieve, operation steps are relatively simple, requirements for experiment instruments and experiment environments are not high, and implementation is easy.

Description

technical field [0001] The invention belongs to the technical field of direct writing processing of a femtosecond laser system, and in particular relates to an image focusing method of a femtosecond laser system. Background technique [0002] Modern social science and technology are developing in the direction of "micro". Micro devices are widely used in various fields such as electronics, optics, machinery, biology, bionics, etc., and high-precision components are bound to put forward higher requirements for processing methods. Femtosecond laser processing technology stands out from other three-dimensional processing methods due to its wide range of processable materials and high processing accuracy, but it also has the problem of low processing efficiency. Therefore, whether the focusing operation before processing is simple and accurate is crucial to the entire processing process. [0003] Aiming at the focusing problem of the optical processing system, there are three k...

Claims

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Application Information

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IPC IPC(8): G02B21/24G02B21/33G02B21/36G02B21/00B23K26/046B23K26/064
CPCB23K26/046B23K26/0643B23K26/0648G02B21/0016G02B21/244G02B21/245G02B21/33G02B21/365
Inventor 陈岐岱刘华孙洪波
Owner JILIN UNIV
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