Chemical vapor deposition product component prediction method

Abstract

The invention discloses a chemical vapor deposition product component prediction method which comprises the following steps: S1, calculating a partition function according to process conditions; S2, calculating hot melting and entropy; s3, calculating standard generation enthalpy and standard generation Gibbs free energy according to translation, rotation, vibration and electronic partition functions; s4, obtaining balanced yield distribution of all products according to a chemical equilibrium principle, namely a mathematical condition that the total Gibbs free energy of the system is minimum;and S5, adopting process conditions, sedimentary solid phase and yield as input data, and adopting a BP algorithm to establish a training model. S6, after a BP training model is established, analyzing the calculated result in combination with a genetic algorithm, and the highest solid-phase yield under different weight conditions is continuously searched out. The method has the advantages that the model capable of accurately predicting the deposition theoretical product components is established, the optimization target of the maximum multi-component yield is achieved, the CVD industrial production research and development efficiency is improved, and the production cost is reduced.

Description

technical field [0001] The invention relates to the technical field of predicting theoretical products of deposition, in particular to a chemical vapor phase multi-component deposition product component prediction method combining machine learning and multi-field coupling modeling. Background technique [0002] Ceramic matrix composites are a type of composite material that is based on ceramics and combined with other fibers. It has good properties such as high strength, high modulus, low density, high temperature resistance, wear resistance and corrosion resistance. In particular, the high temperature resistance of ceramic matrix composites has drawn attention to its application research in high temperature environments. However, the biggest disadvantage of ceramic materials is that they are brittle and easily oxidized and corroded in high-temperature water and oxygen environments. Therefore, introducing a coating on the surface of ceramic matrix composites or designing a...

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Problems solved by technology

[0014] When the range of process conditions is determined, the problem of deposition product composition can be well determined, but it is difficult to solve single-objective or multi-objective optimization problems, such as finding the process scheme that can obtain the highest deposition component or two

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