PET flexible functional film coating system

A technology of coating system and functional film, applied in gaseous chemical plating, metal material coating process, coating and other directions, can solve the problem of inability to control the flow of surface deposition process and reaction by-product emptying process separately, and it is difficult to achieve rapid reaction by-products. Exhaust gas flow, etc.

Pending Publication Date: 2021-02-02
西安跃亿智产信息科技有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

Although this flow can ensure the best aerodynamic environment for film growth, it is difficult to achieve the gas flow required for the rapid discharge of reaction by-products
The traditional PET...

Method used

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  • PET flexible functional film coating system

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Effect test

Embodiment 1

[0041] To plate barrier Al on the surface of PET flexible base film 2 o 3 Taking the functional membrane as an example, the precursor fluid response sources are TMA and H 2 O. TMA and H 2 The O sources are installed in two different reaction source arrays (see figure 1 Two different reactive source arrays in 41) to avoid their possible in-line mixing. The average temperature in the reaction chamber is 150°C, the sample heating temperature is 250°C, and the gas pipeline temperature is 50°C. The time sequence of reactant injection and by-product evacuation for single-layer coating is: 100 milliseconds H 2 O molecule injection + 500 millisecond reaction by-product discharge + 100 millisecond TMA molecule injection + 300 millisecond reaction by-product discharge. The system uses BOCEdwards mechanical vacuum pumps to establish a vacuum environment in the reaction chamber. Flow control adopts MKS company IP66 series mass flow controller (MFC). The air valve adopts the DL ser...

Embodiment 2

[0048] To plate barrier TiO on the surface of PET flexible base film 2 Functional membrane as an example, the precursor fluid reaction source is respectively TiCl 4 with H 2 O. TiCl 4 with H 2 The O sources are installed in two different reaction source arrays (see figure 1 Two different reactive source arrays in 41) to avoid their possible in-line mixing. The average temperature in the reaction chamber is 120°C, the sample heating temperature is 220°C, and the gas pipeline temperature is 50°C. The time sequence of reactant injection and by-product evacuation for single-layer coating is: 80 milliseconds H 2 O molecule injection + 100 milliseconds infiltration + 500 milliseconds reaction by-product discharge + 100 milliseconds TiCl 4 Molecular injection + 100 ms infiltration + 300 ms reaction by-product discharge. The film growth rate is 0.072 nm / cycle. The coating thickness is 35 nm.

[0049] h 2When the O molecule is injected, the by-product removal fluid introduct...

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Abstract

The invention relates to the technical field of atomic layer deposition, in particular to a PET flexible functional film coating system. The PET flexible functional film coating system provided by theinvention comprises a fluid reaction source input pipeline, a film coating device and a first batching device, the film coating device comprises a film coating device body, a film coating device fluid leading-in pipeline and a film coating device fluid leading-out pipeline, the first batching device comprises a first batching device body, a first batching device fluid leading-in pipeline and a first batching device fluid leading-out pipeline, and the film coating device fluid leading-in pipeline and the first batching device fluid leading-in pipeline are both in fluid communication with the fluid reaction source input pipeline. The PET flexible functional film coating system provided by the invention is beneficial to establishment of laminar flow conditions in the three-dimensional bluffbody surface growth process, inhibition of aerodynamic interface layer separation and rapid completion of the film coating process, atomic layer deposition raw materials can be saved by more than twotimes, and rapid film coating can be realized.

Description

technical field [0001] The invention belongs to the technical field of coating, in particular to a PET flexible functional film coating system. Background technique [0002] In the development of modern science and technology, especially in the development of nanoscience and technology, almost all related applications involve nano-coating technology for the purpose of realizing various surface functions, especially nano-coating technology that can control the thickness at the atomic scale . In the selection of coating methods, although the wet chemical method under liquid phase conditions is low in cost, it is difficult to form a uniform and dense high-quality nano-coating layer of equal thickness. The currently widely used nano-coating technologies are based on nano-coating technologies under gas phase conditions, such as physical vapor deposition, chemical vapor deposition, and atomic layer deposition. Among them, the atomic layer deposition technology has a unique surfa...

Claims

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Application Information

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IPC IPC(8): C23C16/455
CPCC23C16/45544
Inventor 汪源源
Owner 西安跃亿智产信息科技有限公司
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